2013
DOI: 10.3788/ope.20132111.2893
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Growth and characterization of lead zirconate titanate (PZT) thin films

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“…Piezoelectric ceramics are ceramic materials with the piezoelectric effect, composed of a series of inorganic materials and metal oxides [20]. Lead zirconate titanate (PZT), as a material with a sizeable piezoelectric coefficient and high electromechanical coefficient [21], accounts for a large proportion of the application range of piezoelectric ceramics. However, due to its strict preparation environment, high cost, and toxic substances such as lead, its use is gradually reduced [22].…”
Section: Nano Piezoelectric Ceramicsmentioning
confidence: 99%
“…Piezoelectric ceramics are ceramic materials with the piezoelectric effect, composed of a series of inorganic materials and metal oxides [20]. Lead zirconate titanate (PZT), as a material with a sizeable piezoelectric coefficient and high electromechanical coefficient [21], accounts for a large proportion of the application range of piezoelectric ceramics. However, due to its strict preparation environment, high cost, and toxic substances such as lead, its use is gradually reduced [22].…”
Section: Nano Piezoelectric Ceramicsmentioning
confidence: 99%