Growth and characterization of lithium niobate planar waveguides by liquid phase epitaxy

Lu, Yi; Dekker, Peter; Dawes, Judith M.

doi:10.1016/j.jcrysgro.2008.12.035

Cited by 24 publications

(10 citation statements)

References 14 publications

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“…Liquid phase epitaxy growth was carried out on the laser micro-machined substrates. The experimental setup and procedure were similar to that reported previously for planar samples [26].…”

Section: Channel Waveguides Grown By Liquid Phase Epitaxy On Laser-mamentioning

confidence: 80%

“…Optical micrographs of typical arrays of trenches machined at these two fluences are shown for comparison in Figure 3. Lithium niobate experimental The channels were filled by liquid phase epitaxial growth with K2O flux using established thin film growth conditions [26]. As indicated in Figure 6 (a), the growth initiated in both sidewalls of the V-groove and each nucleation site has the shape of a pyramid.…”

Section: Laser Processingmentioning

confidence: 99%

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Channel Waveguides in Lithium Niobate and Lithium Tantalate

Johnston

Dekker

et al. 2020

Preprint

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Low-loss photonic waveguides in lithium niobate offer versatile functionality as nonlinear frequency converters, switches, and modulators for integrated optics. Combining the flexibility of laser processing with liquid phase epitaxy we have fabricated and characterized lithium niobate channel waveguides on lithium niobate and lithium tantalate. We used liquid phase epitaxy with K2O flux on laser-machined lithium niobate and lithium tantalate substrates. The laser-driven rapid-prototyping technique can be programmed to give machined features of various sizes, and liquid phase epitaxy produces high quality single-crystal, lithium niobate channels. The surface roughness of the lithium niobate channels on a lithium tantalate substrate was measured to be 90 nm. The lithium niobate channel waveguides exhibit propagation losses of 0.26 ± 0.04 dB/mm at a wavelength of 633 nm. Second harmonic generation at 980 nm was demonstrated using the channel waveguides, indicating that these waveguides retain their nonlinear optical properties.

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“…Liquid phase epitaxy growth was carried out on the laser micro-machined substrates. The experimental setup and procedure were similar to that reported previously for planar samples [26].…”

Section: Channel Waveguides Grown By Liquid Phase Epitaxy On Laser-mamentioning

confidence: 80%

Section: Laser Processingmentioning

confidence: 99%

Channel Waveguides in Lithium Niobate and Lithium Tantalate

Johnston

Dekker

et al. 2020

Preprint

Self Cite

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“…After liquid phase epitaxy growth of lithium niobate on the patterned substrate, the surface roughness was measured to be ~92 nm, compared with ~60 nm for channel waveguides fabricated by the ion in-diffusion technique. In the case of liquid phase epitaxial growth, the waveguide is inherently crystalline and of good optical quality as evidenced by the second harmonic generation results and previous studies of liquid phase epitaxially grown planar crystalline waveguides [ 29 ].…”

Section: Resultsmentioning

confidence: 99%

“…The channels were filled by liquid phase epitaxial growth with K 2 O flux using established thin film growth conditions [ 29 ]. As indicated in Figure 6 a, the growth initiated in both sidewalls of the V-groove and each nucleation site has the shape of a pyramid.…”

Section: Resultsmentioning

confidence: 99%

Channel Waveguides in Lithium Niobate and Lithium Tantalate

Johnston

Dekker

et al. 2020

Molecules

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“…Of particular interest are the elimination of rotational domains, as this has been shown to strongly effect optical quality [15,16]. There are various epitaxial methods that have successfully grown LN, including liquid phase epitaxy (LPE) [17][18][19][20][21][22][23][24][25][26], sputtering [12,14,[27][28][29][30][31][32][33][34][35][36][37][38][39][40], chemical vapor deposition (CVD) [41][42][43][44][45][46][47][48][49][50], pulsed laser deposition (PLD) [13,[51][52][53][54][55][56][57][58][59][60]…”

Section: Introductionmentioning

confidence: 99%

Epitaxy of LiNbO3: Historical Challenges and Recent Success

2021

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High-quality epitaxial growth of thin film lithium niobate (LiNbO3) is highly desirable for optical and acoustic device applications. Despite decades of research, current state-of-the-art epitaxial techniques are limited by either the material quality or growth rates needed for practical devices. In this paper, we provide a short summary of the primary challenges of lithium niobate epitaxy followed by a brief historical review of lithium niobate epitaxy for prevalent epitaxial techniques. Available figures of merit for crystalline quality and optical transmission losses are given for each growth method. The highest crystalline quality lithium niobate thin film was recently grown by halide-based molecular beam epitaxy and is comparable to bulk lithium niobate crystals. However, these high-quality crystals are grown at slow rates that limit many practical applications. Given the many challenges that lithium niobate epitaxy imposes and the wide variety of methods that have unsuccessfully attempted to surmount these barriers, new approaches to lithium niobate epitaxy are required to meet the need for simultaneously high crystalline quality and sufficient thickness for devices not currently practical by existing techniques.

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Growth and characterization of lithium niobate planar waveguides by liquid phase epitaxy

Cited by 24 publications

References 14 publications

Channel Waveguides in Lithium Niobate and Lithium Tantalate

Channel Waveguides in Lithium Niobate and Lithium Tantalate

Channel Waveguides in Lithium Niobate and Lithium Tantalate

Epitaxy of LiNbO3: Historical Challenges and Recent Success

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