Growth and characterization of nanodiamond layers prepared using the plasma-enhanced linear antennas microwave CVD system

Abstract

, et al.. Growth and characterization of nanodiamond layers prepared using the plasma-enhanced linear antennas microwave CVD system. Journal of Physics D: Applied Physics, IOP Publishing, 2010, 43 (37) Abstract. Industrial applications of PE CVD diamond grown on large area substrates, 3D shapes, at low substrate temperatures and on standard engineering substrate materials require novel plasma concepts. Based on the pioneering work of the group at AIST in Japan, highdensity coaxial delivery type of plasmas have been explored [1]. However, an important challenge is to obtain commercially interesting growth rates at very low substrate temperatures. In the presented work we introduce the concept of novel linear antenna sources, designed at Leybold Optics Dresden, using high-frequency pulsed MW discharge with a high plasma densitiy. This type of pulse discharges lead to the preparation of nanocrystalline diamond thin films, compared to ultra-nanocrystalline diamond thin films prepared in Ref [1]. We present OES data for the CH 4 -CO 2 -H 2 gas chemistry and we discuss the basic properties of the nanocrystalline diamond (NCD) films grown.

Polycrystalline Diamond Thin Films for Advanced Applications

“…Nuclear fuel cladding (NFCs) are typically produced from zirconium alloys (with a common subgroup trademarked Zircaloy2), a material with very low absorption cross-section of thermal neutrons, high ductility, hardness and corrosion resistance [1][2][3][4]. Zircaloy2 serves faultlessly under standard operation conditions of the plant sealing the uranium oxide fuel pellets.…”

“…Such columnar structure is primarily made of diamond grains (crystallites) held together by thin layers of amorphous and graphitic inclusions located within the so-called grain boundaries. Overall, the PCD film thickness, the size of diamond grains at the surface and its roughness are determined at the moment when growth process is terminated [1]. The technological achievements in the synthesis of diamond thin films over the past decade subsequently led to the utilization of outstanding diamond properties and development of a wide range of applications in various fields of engineering.…”

“…Furthermore, besides the relevant diamond properties, the suitability for applications also depends on various material parameters such as substrate nature, substrate dimensions, possibility of non-planar geometries, surface morphology, electrical conductivity, capability of device fabrication, electrochemical properties (given by the sp diamond films over single-crystalline form (low-cost, large area products), a variety of applications already available expanded beyond classical mechanical use of diamond. These include CVD polycrystalline diamond for optical, electronic and electrochemical applications, CVD diamond grades suitable for thermal management as well as PCD films for a number of further advanced applications [1][2][3][4][5][6].…”

“…Various corrosion tests were primarily focused on determining the ability of diamond layer to withstand emergency situations in nuclear reactors. The deposition of a polycrystalline diamond layer was carried out using linear antenna microwave plasma-enhanced chemical vapour deposition (LA-MW PECVD) apparatus (Figure 2) [1]. …”

Defect studies of thin ZnO films prepared by pulsed laser deposition

“…Four different substrates were used: sapphire (0 0 0 1), MgO (1 0 0) and fused silica (FS) supplied by MaTecK GmbH and nanocrystalline diamond (NCD) film on silicon (1 0 0) wafer. NCD films were prepared using plasma-enhanced linear antennas microwave CVD system [5]. Prior to deposition, the substrates except of NCD were baked out in vacuum at 950 • C for 5 min to remove remaining surface contamination.…”