“…The use of a low pressure reactor, instead of an atmospheric reactor, allows a more efficient use of the reactant gases at high velocity and high partial pressure. The system consists of a horizontal quartz tube, heated by a three-zone furnace (allowing the control of the GaCl source temperature, mixing temperature and substrate temperature, repectively (9,10), and sealed to allow low pressure operation in the range of 1 to 5 torr. The arsenic source consists of arsine (AsH 3 ), which decomposes on the sample surface; while, the Si doping source was the chlorosilane formed in situ by the reaction between HCl and Si arising from the reactor walls.…”