This article reports on Li self-diffusion in lithium containing metal oxide compounds. Case studies on LiNbO 3 , Li 3 NbO 4 , LiTaO 3 , LiAlO 2 , and LiGaO 2 are presented. The focus is on slow diffusion processes on the nanometer scale investigated by macroscopic tracer methods (secondary ion mass spectrometry, neutron reflectometry) and microscopic methods (nuclear magnetic resonance spectroscopy, conductivity spectroscopy) in comparison. Special focus is on the influence of structural disorder on diffusion.