INTRODUCTIONQuasi zero-dimensional semiconductor quantumdot (QD) structures having delta-function distribution of the density of states and the discrete energy levels of carriers induced by three-dimensional quantum confinement provide the potential for more efficient light emitting diodes and lasers employing quantum dots as an active medium. 1,2,3 The direct growth technique of coherently strained defect-free self-assembled quantum dots (SAQDs) 4 on planar substrates using the coherent StranskiKrastanov growth mode 5 offers the potential to realize quantum-dot-based devices with improved performance, which has been theoretically predicted. 1 Also, due to its intrinsic strain-induced growth mode, self-assembled quantum dot growth can overcome the limitations of the requirement for lattice matching between the substrate and the active quantumdot layer, making it possible to produce bandgapengineered high-quality materials, hence, providing a wider wavelength range for high-efficiency light emitters. Especially, III-Phosphide SAQD structures can be used for light emitters operating in the visible spectral region, depending on the size and composition of the quantum dots. Considering the "blue shift" effect of the emission from the SAQDs induced from multiple orders of quantum confinement and compressive strain on QDs, binary and ternary IIIPhosphide SAQD structures have a potential to extend the wavelength of light emitters to the yellow or green spectral regions.Binary InP SAQDs have been generally grown on GaAs or GaP substrates 6 (for InP on GaAs and GaP substrates, the lattice mismatches are ϳ3.8% and ϳ7.7%, respectively). In the structures having active regions containing InP SAQDs on GaAs substrates, InP SAQDs are generally grown on an In 0.49 Ga 0.51 P matrix layer by molecular beam epitaxy (MBE) 7 or by metalorganic chemical vapor deposition (MOCVD). 8,9 We have optimized the MOCVD growth conditions of InP SAQDs on In 0.49 Al 0.51 P 10,11 and In 0.49 (Al 0.6 Ga 0.4 ) 0.51 P 12 matrix layers. Growth parameter optimization of binary InP SAQDs has led to a high dot density (ϳ10 10 cm Ϫ2 ) and dislocation-free SAQDs having sizes controllable from ϳ5 nm to ϳ20 nm average We report the characteristics of ternary InAlP and InGaP self-assembled quantum dots grown by metalorganic chemical vapor deposition. The structural and optical properties of these ternary quantum dots are compared with the characteristics of binary InP quantum dots grown under similar conditions. Because these ternary quantum dots have different bandgaps, strain, and composition compared to binary InP quantum dots, the ternary quantumdot optical and physical properties are markedly different. The quantum-dot structures are grown uncapped (exposed QDs) and capped (embedded QDs) and characterized by atomic force microscopy (AFM) and photoluminescence (PL). InAlP quantum dots have higher densities and smaller sizes and InGaP quantum dots have smaller densities, as compared with InP quantum dots grown under similar conditions. Also, a random and b...