2015
DOI: 10.1002/sia.5774
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Growth, characterization and interfacial reaction of magnetron sputtered Pt/CeO2 thin films on Si and Si3N4 substrates

Abstract: Growth of magnetron sputtered Pt/CeO 2 thin films on Si and Si 3 N 4 were characterized by X-ray diffraction (XRD), field emission scanning electron microscopy (FESEM), atomic force microscopy (AFM) and X-ray photoelectron spectroscopy (XPS). Interaction of Pt/CeO 2 films with Si on Si and Si 3 N 4 substrates was extensively investigated by XPS. XRD studies show that films are oriented preferentially to (200) direction of CeO 2 . XPS results show that Pt is mainly present in +2 oxidation state in Pt/CeO 2 /Si … Show more

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Cited by 12 publications
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“…These ionic species are experimentally observed in Pt/CeO 2 thin films prepared with magnetron sputtering deposition. 16,33 Our model of Pt− CeO 2 (111) solid solution was a (3 × 3) supercell in which one surface Ce ion is substituted by a Pt atom (Figure 1b). The analyses of DOS and PDOS of the Pt−CeO 2 (111) solid solution (Figure S1) show that the Ce(f) states are above the Fermi level, confirming that there is no surface reduction induced by Pt doping and that the Pt species are in 4+ oxidation state.…”
Section: Resultsmentioning
confidence: 99%
“…These ionic species are experimentally observed in Pt/CeO 2 thin films prepared with magnetron sputtering deposition. 16,33 Our model of Pt− CeO 2 (111) solid solution was a (3 × 3) supercell in which one surface Ce ion is substituted by a Pt atom (Figure 1b). The analyses of DOS and PDOS of the Pt−CeO 2 (111) solid solution (Figure S1) show that the Ce(f) states are above the Fermi level, confirming that there is no surface reduction induced by Pt doping and that the Pt species are in 4+ oxidation state.…”
Section: Resultsmentioning
confidence: 99%
“…The Pt 4f spectra were deconvoluted into two pairs for all samples. The peaks at 72.65-72.68 eV and 75.98-76.08 eV are attributed to Pt 2+ species, and the peaks at 74.47-74.62 eV and 77.80-77.94 eV are associated with Pt 4+ species [40]. The ratio of Pt 4+ in the total Pt species was calculated based on the corresponding peak areas and listed in Table 3.…”
Section: Catalyst Characterizationmentioning
confidence: 99%