Growth Control and Thickness Measurement of Thin Films

Abstract

This article presents the main control parameters of thin film growth. Structure zone models and methods to determine the deposition rate are discussed. In addition, the most important techniques used to determine thin films thickness (such as the quartz oscillator method and various optical methods) and roughness (such as STM, AFM, LEED, RHEED, and X‐ray reflectivity) are also presented.