Growth dynamics of nanocrystalline diamond films produced by microwave plasma enhanced chemical vapor deposition in methane/hydrogen/air mixture: Scaling analysis of surface morphology

Podgursky, Vitali; Bogatov, Andrei; Седов, В. С.; Силдос, И.; Mere, Arvo; Viljus, Mart; Buijnsters, Josephus Gerardus; Ralchenko, V.G.

doi:10.1016/j.diamond.2015.07.002

Cited by 28 publications

(27 citation statements)

References 23 publications

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“…Raman spectra ( Figure 10) taken on the native surface of the NCD and Al 2 O 3 /NCD films after the tests at different temperatures are similar to ones investigated in our previous studies of the NCD films [5,12,13]. The main peak positions are as follows: 1336 cm −1 (diamond), 1366 cm −1 (D band), 1549 cm −1 (G band), 1135 cm −1 , and 1480 cm −1 (t-Pa, trans-polyacetylene).…”

Section: Resultssupporting

confidence: 68%

“…The XRD pattern taken in grazing incident mode from the as-deposited Al 2 O 3 /NCD film is shown in Figure 2. The peak positions are similar to the reflections from the NCD film investigated in our previous study of the NCD films grown on Si(100) and (110) single crystal diamond [12,13]; no peaks corresponding to Si and β-SiC were observed due to grazing incident set-up. The Al 2 O 3 layer prepared at low temperature is amorphous [14][15][16].…”

Section: Methodssupporting

confidence: 78%

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High Temperature Tribological Properties of Al2O3/NCD Films Investigated Under Ambient Air Conditions

et al. 2020

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Comparative analysis of dry sliding wear behavior of nanocrystalline diamond (NCD) films and NCD films coated with a thin Al 2 O 3 layer (Al 2 O 3 /NCD) is the main goal of the present study. Plasma-enhanced chemical vapor deposition (PECVD) and atomic layer deposition (ALD) methods were used to prepare the NCD and alumina films, respectively. Sliding wear tests were conducted at room temperature (RT), 300 and 450 • C in air. Independent of type of specimen, superlubricating behavior with the coefficient of friction (COF) in the range of 0.004-0.04 was found for the tests at 300 • C. However, the COF value measured on the Al 2 O 3 /NCD films in the tests at 450 • C is lower than that for the NCD film. A relatively short run-in period and a stable COF value of about 0.15 were observed at this temperature for the Al 2 O 3 /NCD films. The width of the wear scars measured on the Al 2 O 3 /NCD films after the tests at 450 • C is significantly smaller in comparison with the NCD film. The apparent wear volume of the wear scar on the NCD film tested at 450 • C was noticeably higher than that on the Al 2 O 3 /NCD films.

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Section: Resultssupporting

confidence: 68%

Section: Methodssupporting

confidence: 78%

High Temperature Tribological Properties of Al2O3/NCD Films Investigated Under Ambient Air Conditions

et al. 2020

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“…1d) enables characterization of topography over lateral length scales ranging from tens-ofnanometers down to 4 Å -a regime of roughness that has not been measured in prior investigations of UNCD (e.g., Ref. 34 ) and which is not accessible using any conventional technique for topography measurement. 31 Figure 1: Transmission electron microscopy reveals the surface structure at the Ångström-scale.…”

Section: Resultsmentioning

confidence: 99%

Combining TEM, AFM, and Profilometry for Quantitative Topography Characterization Across All Scales

Gujrati

Khanal

Pastewka

et al. 2018

ACS Appl. Mater. Interfaces

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Surface roughness affects the functional properties of surfaces, including adhesion, friction, hydrophobicity, biological response, and electrical and thermal transport properties. However, experimental investigations to quantify these links are often inconclusive because surfaces are fractal-like, and the values of measured roughness parameters depend on measurement size. Here, we demonstrate the characterization of topography of an ultrananocrystalline diamond (UNCD) surface at the angstrom scale using transmission electron microscopy (TEM), as well as its combination with conventional techniques to achieve a comprehensive surface description spanning 8 orders of magnitude in size. We performed more than 100 individual measurements of the nanodiamond film using both TEM and conventional techniques (stylus profilometry and atomic force microscopy). While individual measurements of root-mean-square (RMS) height, RMS slope, and RMS curvature vary by orders of magnitude, we combine the various techniques using the power spectral density and use this to compute scale-independent parameters. This analysis reveals that "smooth" UNCD surfaces have an RMS slope greater than 1, even larger than the slope of the Austrian Alps when measured on the scale of a human step. This approach of comprehensive multiscale roughness characterization, measured with angstrom-scale detail, will enable the systematic evaluation and optimization of other technologically relevant surfaces, as well as systematic testing of the many analytical and numerical models for the behavior of rough surfaces.

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“…The growth mechanisms and surface morphology of the NCD films used in the current study were investigated in our recent work [25]. It was found that the surface morphology changes from the cusp-like to mountain-like and the surface roughness increases with increasing film thickness.…”

Section: Introduction *mentioning

confidence: 97%

Effect of Nanocrystalline Diamond Films Deflection on Wear Observed in Reciprocating Sliding Tests

Podgursky

Bogatov

Sobolev

et al. 2016

J. Coat. Sci. Technol.

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The present study deals with the tribological behavior of nanocrystalline diamond (NCD) films. The diamond films were deposited by microwave plasma enhanced chemical vapor deposition (MPCVD) in methane/hydrogen/air plasma on the Si(100) substrates. The tribological properties were studied by reciprocal sliding tests against Si3N4 balls. The depth profiles and surface morphology of the wear scars were investigated by means of mechanical profilometry and scanning electron microscopy (SEM). Various adaptation processes occur between contacting surfaces including asperity polishing, formation of carbonaceous tribolayer and ripple patterns on the wear scar surfaces. The film deflection is the specific form of adaptation decreasing contact pressure and, therefore, the damage (including wear) of both counter bodies. The deflection of NCD films in sliding tests can be related with the effect of fatigue.

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Growth dynamics of nanocrystalline diamond films produced by microwave plasma enhanced chemical vapor deposition in methane/hydrogen/air mixture: Scaling analysis of surface morphology

Cited by 28 publications

References 23 publications

High Temperature Tribological Properties of Al2O3/NCD Films Investigated Under Ambient Air Conditions

High Temperature Tribological Properties of Al2O3/NCD Films Investigated Under Ambient Air Conditions

Combining TEM, AFM, and Profilometry for Quantitative Topography Characterization Across All Scales

Effect of Nanocrystalline Diamond Films Deflection on Wear Observed in Reciprocating Sliding Tests

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