Proceedings of the 3rd Annual International Conference on Mechanics and Mechanical Engineering (MME 2016) 2017
DOI: 10.2991/mme-16.2017.75
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Growth Feature of Diamond-Like Carbon Films by Various Vacuum Plasma Methods

Abstract: Abstract. Diamond-like carbon (DLC) films were prepared on silicon substrate using four different vacuum plasma methods: magnetron sputtering (MS), pulse laser ablation (PLA), ion beam deposition (IBD) and pulse cathode vacuum arc evaporation (CVAE). The microstructure, surface morphology and optical properties of the DLC films were investigated by Raman spectroscopy, atomic force microscope (AFM) and UV-visible spectrophotometer. The results showed that the films prepared by different vacuum plasma methods va… Show more

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