2011
DOI: 10.1021/la2003035
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Growth Mechanisms Involved in the Synthesis of Smooth and Microtextured Films by Acetylene Magnetron Discharges

Abstract: The growth of hydrogenated amorphous carbons (a-C:H) produced by continuous or pulsed discharges of acetylene (C(2)H(2)) in an unbalanced magnetron setup was investigated. At 5 × 10(-3) Torr, only smooth films are obtained, whereas at 5 × 10(-1) Torr using a pulsed discharge some microtextured films are formed if the duty cycle is low. The morphology of these microtextured films consists of nanoparticles, filamentary particles, and particular agglomerates ("microflowers"). This paper presents a study of acetyl… Show more

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Cited by 10 publications
(12 citation statements)
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“…Induced polymeric‐like structure is related to a high presence of sp 2 clusters and the generation of transpolyacetylene chains 47. Nanoindentation measurements of the present samples have shown typical hardness value of 3 GPa, whereas the reduced Young's modulus was around 35 GPa, confirming the soft character of the grown a‐C:H coatings 47…”
Section: Resultsmentioning
confidence: 99%
“…Induced polymeric‐like structure is related to a high presence of sp 2 clusters and the generation of transpolyacetylene chains 47. Nanoindentation measurements of the present samples have shown typical hardness value of 3 GPa, whereas the reduced Young's modulus was around 35 GPa, confirming the soft character of the grown a‐C:H coatings 47…”
Section: Resultsmentioning
confidence: 99%
“…In this context, the scientific community has intensively investigated the influence of the chemical precursors, among which the methane (CH 4 ) and the acetylene (C 2 H 2 ) have received particular attention. [10,[15][16][17][18] These molecules present significant differences in terms of hydrogen content (H/C ¼ 4 for CH 4 and 1 for C 2 H 2 ) as well as carbon bonding configuration (sp 3 for CH 4 and sp 1 for C 2 H 2 ), resulting in different growth mechanisms which would affect the sp 3 and the hydrogen proportion in the coatings.…”
Section: Introductionmentioning
confidence: 99%
“…Thus, growth studies based on optical spectroscopy [1,22], spectroscopy ellipsometry [20], mass spectrometry [23,24] and energetic considerations about the impinging species [25] can be found. Other proposed models come from the analysis of the a-CH x coating properties.…”
Section: Introductionmentioning
confidence: 99%