In order to realize high-performance organic thin-film transistors (TFT), two parameters of the organic semiconducting layer are desired: single crystallinity for high mobility, and patterning for low off currents. High-quality single crystals can be fabricated using vapor techniques such as physical vapor transport (PVT) but they require high temperatures close to thermodynamic 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57 58 59 60 2 equilibrium, for example, 240°C for pentacene. Such high temperatures are not ideal for TFT fabrication on plastic substrates and limit the use of PVT in flexible electronics applications.In this work arrays of pentacene single crystals were directly deposited at low temperature of 40°C by vacuum thermal evaporation through micro-fabricated stencil masks (stencil lithography). By decreasing the stencil aperture size down to 1 µm x 1 µm, we were able to limit the nucleation area until only one grain per aperture is nucleated and grown. We studied systematically scaling effects for large singe crystal growth and discuss details of the growth morphology. We found for instance that the formed pentacene crystals are one monolayer thick and the crystal area is much larger than the aperture size. This can be explained by the diffusion of adsorbed molecules on the surface laterally under the shadow mask, where they are protected from other impinging molecules. The diffusion away from the impinging area under the aperture affects the nucleation density inside this area and was used to calculate the diffusion length to nucleation λ N = 0.66 ± 0.11 µm of pentacene on SiO 2 at 40°C. Our diffusion-driven growth of organic single crystals by stencil lithography is a direct method to grow patterned arrays of single crystalline organic thin-film semiconductor layers.