Growth of Bi2O3 Films by Thermal- and Plasma-Enhanced Atomic Layer Deposition Monitored with Real-Time Spectroscopic Ellipsometry for Photocatalytic Water Splitting
Abstract:Ultrathin
Bi2O3 films were grown by thermal-
and plasma-enhanced ALD by using [Bi(tmhd)3] as bismuth
precursor. The use of an O2 plasma instead of H2O as oxidant increases the growth per cycle (GPC) from 0.24 to 0.35
Å/cycle and shifts the temperature window from 210–270
to 270–330 °C. The deposited films were grown conformally
and are oxygen rich, dense, and amorphous with bandgaps in the
range 2.7–2.9 eV. Real-time spectroscopic ellipsometry reveals
a superior reactivity of the plasma toward Bi(tmhd)
x
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“…75 Nonetheless, (110)-oriented grains were also detected in the final film which are probably formed because of the distinct precursor chemistry that leads to non-optimal reactivity and thermal compatibility. [76][77][78] The use of solution processing to prepare BFO films is a solid alternative in which epitaxial and polycrystalline films have been successfully prepared showing suitable properties. 80 In addition, the metal precursor availability and compatibility allow easy modification of the film stoichiometry and composition by atomic-scale precursor intermixing to fine tune the physical properties.…”
Section: Complex Oxides On Rigid Substratesmentioning
confidence: 99%
“…75 Nonetheless, (110)-oriented grains were also detected in the final film which are probably formed because of the distinct precursor chemistry that leads to non-optimal reactivity and thermal compatibility. 76–78…”
Section: Complex Oxides On Rigid Substratesmentioning
Oxides offer unique physical and chemical properties that inspire rapid advances in materials chemistry to design and nanoengineer materials compositions and implement them in devices for a myriad of applications.
“…75 Nonetheless, (110)-oriented grains were also detected in the final film which are probably formed because of the distinct precursor chemistry that leads to non-optimal reactivity and thermal compatibility. [76][77][78] The use of solution processing to prepare BFO films is a solid alternative in which epitaxial and polycrystalline films have been successfully prepared showing suitable properties. 80 In addition, the metal precursor availability and compatibility allow easy modification of the film stoichiometry and composition by atomic-scale precursor intermixing to fine tune the physical properties.…”
Section: Complex Oxides On Rigid Substratesmentioning
confidence: 99%
“…75 Nonetheless, (110)-oriented grains were also detected in the final film which are probably formed because of the distinct precursor chemistry that leads to non-optimal reactivity and thermal compatibility. 76–78…”
Section: Complex Oxides On Rigid Substratesmentioning
Oxides offer unique physical and chemical properties that inspire rapid advances in materials chemistry to design and nanoengineer materials compositions and implement them in devices for a myriad of applications.
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