2008
DOI: 10.1117/12.798231
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Growth of CNT array for physiological monitoring applications

Abstract: Carbon nanotube based electrodes can overcome the drawbacks posed by the conventional wet electrodes, used for physiological monitoring. Here, multiwalled CNT arrays were grown on highly doped n-type Si-wafers with Fecatalyst layer, using a thermal CVD system. Acetylene was used as the carbon source gas, while Ammonia was the reducing gas and Argon was the purging inert gas, in these experiments. The thermal annealing of the catalyst layer and the carbon nanotube growth schedule, were optimized to get a dense … Show more

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Cited by 3 publications
(2 citation statements)
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“…Using CNT as an array/forest on the surface of the electrode improved electrical contact by allowing penetration of the outer layers of the skin (stratum corneum). However, they are limited as they cannot form good contacts through skin pores and hairs as CNTs are uniformly grown on the substrate without any gaps [38][39][40].…”
Section: Introductionmentioning
confidence: 99%
“…Using CNT as an array/forest on the surface of the electrode improved electrical contact by allowing penetration of the outer layers of the skin (stratum corneum). However, they are limited as they cannot form good contacts through skin pores and hairs as CNTs are uniformly grown on the substrate without any gaps [38][39][40].…”
Section: Introductionmentioning
confidence: 99%
“…CNT based biosensors are shown to be biosafe at low concentration external to the body [12,13]. Previous attempts for CNT dry electrodes [14][15][16][17][18][19] had limited success, primarily due to: (1) CNTs were not patterned in those electrodes resulting in a dense surface of CNT tips, and (2) the height of the carbon nanotubes was small (tens of µm range). We have developed a patterned vertical CNT (pvCNT) for dry impedimetric sensing.…”
Section: Introductionmentioning
confidence: 99%