Growth of Gallium Oxide Thin Films on Quartz Substrates Using Mist Chemical Vapor Deposition for Deep Ultraviolet Photodetectors

UNO, Kazuyuki; TANAKA, Issei; OTOMO, Hibiki

doi:10.2472/jsms.73.778

J. Soc. Mat. Sci., Japan

2024

DOI: 10.2472/jsms.73.778

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Growth of Gallium Oxide Thin Films on Quartz Substrates Using Mist Chemical Vapor Deposition for Deep Ultraviolet Photodetectors

Kazuyuki UNO,

Issei TANAKA,

Hibiki OTOMO

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Growth of Gallium Oxide Thin Films on Quartz Substrates Using Mist Chemical Vapor Deposition for Deep Ultraviolet Photodetectors

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References 27 publications

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