2006
DOI: 10.1088/0953-2048/19/6/l02
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Growth of high-quality large-area MgB2thin films by reactive evaporation

Abstract: We report a new in-situ reactive deposition thin film growth technique for the production of MgB 2 thin films which offers several advantages over all existing methods and is the first deposition method to enable the production of high-quality MgB 2 films for real-world applications. We ha ve used this growth method, which incorporates a rotating pocket heater, to deposit MgB 2 films on a variety of substrates, including single-crystalline, polycrystalline, metallic, and semiconductor materials up to 4" in dia… Show more

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Cited by 84 publications
(79 citation statements)
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“…The IMD was measured by the stripline-resonator technique, described below, 4,5 employing thin films of MgB 2 that were deposited by the reactive-evaporation method, 20,21 in which boron is deposited in vacuum onto a substrate that rapidly rotates through a region of high-pressure magnesium vapor where the MgB 2 film is formed. This method yields very clean, stable, large-area, double-sided MgB 2 films on a multitude of substrate materials.…”
Section: Methodsmentioning
confidence: 99%
“…The IMD was measured by the stripline-resonator technique, described below, 4,5 employing thin films of MgB 2 that were deposited by the reactive-evaporation method, 20,21 in which boron is deposited in vacuum onto a substrate that rapidly rotates through a region of high-pressure magnesium vapor where the MgB 2 film is formed. This method yields very clean, stable, large-area, double-sided MgB 2 films on a multitude of substrate materials.…”
Section: Methodsmentioning
confidence: 99%
“…21,22 The film is epitaxial and shows columnar growth morphology, with the c axis tilted by a few degrees from the normal direction of the substrate. For more details see Ref.…”
Section: Methodsmentioning
confidence: 99%
“…We first compare the flux behavior of MgB 2 thin films grown by in situ pulsed laser deposition ͑PLD͒ technique 10 and by a recently developed in situ reactive deposition 11 ͑RD͒ technique. Surprisingly, we do not observe any dendritic instability for the RD samples.…”
mentioning
confidence: 99%
“…12 The samples have typical dimensions of 2 ϫ 6 mm 2 , a critical current density of J c =2ϫ 10 6 A / cm 2 at 20 K and a T c = 34 K. RD epitaxial MgB 2 films of 500 nm thickness also were grown on single crystalline Al 2 O 3 -R substrates, using a single step in situ process. 11 The RD samples were cut to dimensions of 2 ϫ 10 mm 2 . These samples show a higher critical temperature T c = 39 K and also a higher critical current density J c =1ϫ 10 6 A / cm 2 at 36 K with respect to the PLD samples.…”
mentioning
confidence: 99%
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