2010
DOI: 10.1143/jjap.49.085101
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Growth of Millimeter-Scale Vertically Aligned Carbon Nanotubes by Microwave Plasma Chemical Vapor Deposition

Abstract: Millimeter-scale, vertically aligned carbon nanotubes (CNTs) were grown at a relatively low temperature of 700 °C by the microwave plasma chemical vapor deposition. Oxygen and water were used to investigate their role in the growth rate and crystallinity of CNTs. Scanning electron microscopy and transmission electron microscopy were adopted to observe the height and number of walls of the CNTs, respectively. The addition of oxygen significantly increased the growth rate of CNTs (∼23 µm/min) for 70 min, which i… Show more

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Cited by 15 publications
(4 citation statements)
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“…Kim et al [62] reported that oxygen-assisted MPECVD using a mixture of CH 4 /H 2 gases with a Fe/Al 2 O 3 /Si substrate and a temperature of 700°C could give MWCNTs with 4.08 μm length and 5 – 10 nm diameter. They found that upon adding O 2 to the chamber, the CNTs growth rate increased three-fold in comparison with MECVD and two-fold in comparison with WA-MECVD.…”
Section: Carbon Nanotubesmentioning
confidence: 99%
“…Kim et al [62] reported that oxygen-assisted MPECVD using a mixture of CH 4 /H 2 gases with a Fe/Al 2 O 3 /Si substrate and a temperature of 700°C could give MWCNTs with 4.08 μm length and 5 – 10 nm diameter. They found that upon adding O 2 to the chamber, the CNTs growth rate increased three-fold in comparison with MECVD and two-fold in comparison with WA-MECVD.…”
Section: Carbon Nanotubesmentioning
confidence: 99%
“…For flat substrates with fully open and accessible surfaces, AOB can be prepared by both physical and chemical methods, including atomic layer deposition (ALD), electron beam physical vapor deposition (a.k.a. e-beam evaporation), thermal evaporation, spin coating, dip coating, the sol–gel process, and the layer-by-layer (LBL) assembly. When the substrates have spatially complex structures such as highly curved surfaces, particularly those hidden in torturous pores, the creation of a uniform AOB layer to support the growth of CNT arrays is no longer feasible by using most of the existing methods. To our knowledge, aligned CNT arrays have only been synthesized on highly curved surfaces either treated using the expensive ALD method , or with preexisting oxide coatings that can act as buffer, for example, ceramic fibers made of aluminum oxide , and stainless steel with chromium oxide. , …”
Section: Introductionmentioning
confidence: 99%
“…During the last two decades, carbon nanotubes (CNTs) represent a fascinating new material that has attracted much attention and scientific interest subsequently followed to identify their remarkable properties and potential applications. [1][2][3][4][5] CNTs can be geometrically described as a seamless cylinder of a rolled up sheet of carbon atoms (single-walled nanotubes, SWNTs) or multiple nested cylinders consisting of rolled up sheet of carbon atoms (multi-walled nanotubes, MWNTs) of varying shapes. 6) Among various methods for synthesis of CNTs, such as laser ablation, arc-discharge, and chemical vapor deposition (CVD), the CVD method has proven to be an effective method to produce large amount of CNTs as well as allowing direct growth of the nanotubes on suitable substrates.…”
Section: Introductionmentioning
confidence: 99%