2022
DOI: 10.1016/j.vacuum.2022.111179
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Growth of NbO, NbO2 and Nb2O5 thin films by reactive magnetron sputtering and post-annealing

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Cited by 13 publications
(1 citation statement)
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“…Currently, there are few studies and empty reports on such temperature effects on LIDT. Moreover, previous studies showed that the crystallinity of oxide films increased with the rise of temperature by different preparation methods [18][19][20]. The crystal phase transition temperature of Nb 2 O 5 films often exceeds 673 K, which is much higher than that of HfO 2 , ZrO 2 , and TiO 2 films [21].…”
Section: Introductionmentioning
confidence: 98%
“…Currently, there are few studies and empty reports on such temperature effects on LIDT. Moreover, previous studies showed that the crystallinity of oxide films increased with the rise of temperature by different preparation methods [18][19][20]. The crystal phase transition temperature of Nb 2 O 5 films often exceeds 673 K, which is much higher than that of HfO 2 , ZrO 2 , and TiO 2 films [21].…”
Section: Introductionmentioning
confidence: 98%