2001
DOI: 10.1080/01418610108217151
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Growth of niobium nitride/aluminium nitride trilayers and multilayers

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Cited by 12 publications
(13 citation statements)
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“…Furthermore, little has been published on the orientation relationships between the NbN layer and the substrate. The most comprehensive work on orientation relationships has been done using the ALD technique [3] and the PVD technique [4,5]. As a first step to link the structure to the resulting properties of CVD NbN layers, we present in this contribution the synthesis …”
Section: Accepted M Manuscriptmentioning
confidence: 99%
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“…Furthermore, little has been published on the orientation relationships between the NbN layer and the substrate. The most comprehensive work on orientation relationships has been done using the ALD technique [3] and the PVD technique [4,5]. As a first step to link the structure to the resulting properties of CVD NbN layers, we present in this contribution the synthesis …”
Section: Accepted M Manuscriptmentioning
confidence: 99%
“…In the Nb-N phase diagram, five different crystallographic structures are admitted [1,4,9] : α-Nb (Nb with interstitial N), hexagonal close-packed (hcp) β-…”
Section: Phase Analysismentioning
confidence: 99%
“…XRD is commonly used to characterize multilayered materials (Fullerton et al ., 1992) and this is often combined with qualitative imaging of the structure by TEM. However, it is perhaps surprising that there has been very little quantitative comparison of the multilayer structural parameters determined from XRD with those determined from TEM techniques that are increasingly able to determine the same parameters on a local scale with similar precision (Lloyd, 1999; Lloyd & Dunin‐Borkowski, 1999; Lloyd et al ., 2001).…”
Section: Introductionmentioning
confidence: 99%
“…(1997, 1999) examined doped semiconductor layers but the resolution of the EFTEM images was poor and an automatic fitting procedure was not employed to analyse the Fresnel images. Automated fitting of the Fresnel data was used in the work of Lloyd et al . (2001) but only the ‘three‐window’ method was employed to construct elemental maps and it was not identical regions of specimen that were compared.…”
Section: Introductionmentioning
confidence: 99%
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