Fabrication and characterization of planar and channel waveguiding thin films with the goal to develop active and passive elements are intensively studied over the last 20 years. Large scale of materials and properties were tested (morphology, crystallinity, luminescence, waveguiding, etc.). The goal of our contribution is to give an overview of materials and fabrication processes which were used for development and construction of functional planar waveguide lasers (PWL). The compact survey of finalized PWL and their basic parameters is given. A special part is devoted to fabrication of waveguide lasers using laser technology. Applications of thin film waveguide lasers are mentioned. Focusing lens Focusing lens Laser beam -1 Substrate Laser beam -2 Target -1 Target -2 Vacuum chamber Ion sourceScheme of hybrid PLD from two laser targets, with two lasers and ion beam gun