2005
DOI: 10.1016/j.jcrysgro.2005.03.040
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Growth of thick GaN layers with hydride vapour phase epitaxy

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Cited by 59 publications
(66 citation statements)
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“…Some of these thick GaN substrates were grown with HVPE at Link€ oping University, and removed from the sapphire substrates with a laser lift-off technique, as reported previously. 15 Other bulk c-plane GaN substrates were supplied by Furukawa Co., Ltd., Japan. The c-plane Mg doped MOCVD samples were grown at Meijo University as well as at Bremen University, details of the growth procedure can be found in previous papers.…”
Section: Samples and Experimental Proceduresmentioning
confidence: 99%
“…Some of these thick GaN substrates were grown with HVPE at Link€ oping University, and removed from the sapphire substrates with a laser lift-off technique, as reported previously. 15 Other bulk c-plane GaN substrates were supplied by Furukawa Co., Ltd., Japan. The c-plane Mg doped MOCVD samples were grown at Meijo University as well as at Bremen University, details of the growth procedure can be found in previous papers.…”
Section: Samples and Experimental Proceduresmentioning
confidence: 99%
“…1 was grown at Lumilog, SA on a twostep epitaxial lateral overgrowth template, 23 and removed from the sapphire substrate at Linköping University by a laser lift-off technique, as described separately. 24 It had a thickness of about 300 m and a residual donor concentration in the mid 10 16 cm −3 range. Sample no.…”
Section: Samples and Experimental Proceduresmentioning
confidence: 99%
“…The HVPE experiments were carried out in a vertical reactor with a bottom-fed design [4]. The high-temperature zone, kept in our experiments in the range from 1050 to 1100 o C, was heated by an RFgenerator.…”
Section: Methodsmentioning
confidence: 99%
“…HVPE is the most common growth technique for native 2" GaN substrates [2][3][4]. There are different methods for damage-free preparation of free-standing GaN, e.g.…”
Section: Introductionmentioning
confidence: 99%
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