Growth of vertically aligned carbon nanotubes on glass substrate at 450 °C through the thermal chemical vapor deposition method

Tsai, Tsung-Yen; Tai, Nyan‐Hwa; Chen, K.C.; Lee, Sang Hee; Chan, L.; Chang, Yuchou

doi:10.1016/j.diamond.2008.09.001

Cited by 18 publications

(13 citation statements)

References 29 publications

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“…Low temperature carbon nanofiber/nanotube growth by PECVD has been accomplished on Ni 10–16, Fe or Fe–Mo 17, and Ni 0.67 –Fe 0.33 18 catalysts from mainly C 2 H 2 /NH 3 or CH 4 /H 2 precursors. Low temperature thermal CVD grown nanotubes were synthesized from C 2 H 2 /NH 3 and C 2 H 2 precursors on Al–Fe 19 and Co–Ti 20 layered‐type catalysts combinations, respectively.…”

Section: Introductionmentioning

confidence: 99%

Low‐temperature growth of multi‐walled carbon nanotubes by thermal CVD

Halonen

Sápi

Nagy

et al. 2011

Physica Status Solidi (b)

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Low-temperature thermal chemical vapor deposition (thermal CVD) synthesis of multi-walled carbon nanotubes (MWCNTs) was studied using a large variety of different precursor compounds. Cyclopentene oxide, tetrahydrofuran, methanol, and xylene:methanol mixture as oxygen containing heteroatomic precursors, while xylene and acetylene as conventional hydrocarbon feedstocks were applied in the experiments. The catalytic activity of Co, Fe, Ni, and their bi-as well as tri-metallic combinations were tested for the reactions. Low-temperature CNT growth occurred at 400 8C when using bi-metallic Co-Fe and tri-metallic Ni-Co-Fe catalyst (on alumina) and methanol or acetylene as precursors. In the case of monometallic catalyst nanoparticles, only Co (both on alumina and on silica) was found to be active in the low temperature growth (below 500 8C) from oxygenates such as cyclopentene oxide and methanol. The structure and composition of the achieved MWCNTs products were studied by scanning and transmission electron microscopy (SEM and TEM) as well as by Raman and X-ray photoelectron spectroscopy (XPS) and by X-ray diffraction (XRD). The successful MWCNT growth below 500 8C is promising from the point of view of integrating MWCNT materials into existing IC fabrication technologies.

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Section: Introductionmentioning

confidence: 99%

Low‐temperature growth of multi‐walled carbon nanotubes by thermal CVD

Halonen

Sápi

Nagy

et al. 2011

Physica Status Solidi (b)

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“…The density was manually calculated from the enlarged SEM images. The characterization of the CNTs was reported in our previous work . The CNTs were analyzed by a high resolution transmission electronic microscope (HRTEM).…”

Section: Methodsmentioning

confidence: 99%

“…The characterization of the CNTs was reported in our previous work. 40 The CNTs were analyzed by a high resolution transmission electronic microscope (HRTEM). We found that the CNTs have a multiwalled structure and a diameter of ca.…”

Section: Methodsmentioning

confidence: 99%

Iridescence of Patterned Carbon Nanotube Forests on Flexible Substrates: From Darkest Materials to Colorful Films

et al. 2010

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In this study, we prepared carbon nanotube (CNT) forests exhibiting two types of optical properties: so-called "darkest materials" and films displaying iridescence phenomena. The darkest materials, comprising vertically aligned CNT (VA-CNT) forests, displayed extremely low reflections as a result of the rough surface and the trapping of light in the CNT forests. The lengths of the CNTs in the CNT forests had a strong influence on whether the light transmitted through the CNT forest or reflected from the substrate. From an investigation of the limitations of the darkest materials of CNT forests, we prepared CNT surfaces running the gamut from dark materials to iridescent. To study iridescence phenomena, we prepared two kinds of patterns of CNT forests on flexible polycarbonate substrates: CNTs arrayed in hexagonal-hole patterns and broccoli-like CNTs, the latter formed through a combination of inverse nanosphere lithography (INSL) and a poisoned-catalyst mechanism. In the patterned CNT forests, even though the refractive index difference between the CNT film and air was extremely low and even though the CNTs could trap the incident light, the iridescence phenomenon remained, inducing colorful images from the CNT films.

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“…Tsai et al studied the CNT growth on Ti-Co catalyst and were able to demonstrate the growth on a glass substrate in the temperature range of 450-550°C [125]. They sputtered Ti and Co in a layered form (0.1-10 nm) and in hybrid form where both materials were sputtered simultaneously.…”

Section: Cnt Growth Using Thermal Cvdmentioning

confidence: 99%

“…It is found that Ti/Co composites (0.5/0.5 nm and 0.6/ 1.0 nm) corresponding to Ti atomic fractions of 38% and 48% produced vertically aligned CNTs of lengths ranging from 0.5 to 5 μ m in the whole temperature range, whereas no growth was observed for the third composite corresponding to Ti fraction of 78%. Similarly, no CNT growth was observed when only Co was used which shows that Ti plays an important role in the growth of CNTs [125]. Goichi et al optimized Ti (0.5 nm)/Co(0.5 nm) thickness and studied the effect of preheating the C 2 H 2 at 700°C in a two-zone furnace.…”

Section: Cnt Growth Using Thermal Cvdmentioning

confidence: 99%