Growth, structure, and spectroscopic characterization of the Mn-doped GaN thin films

Abstract

The technologies of fabrication of thin film phosphors based on gallium nitride using rf-magnetron sputtering are developed and properties of films are studied. The dependence of GaN-Mn thin films deposition rate on rf-discharge power, substrate temperature and working gas pressure was estimated. The influence of technological conditions of deposition on crystal structure parameters of gallium nitride thin films were investigated. Luminescence and electron spin resonance (ESR) spectra of GaN-Mn thin films have been studied.