Growth, structure and stress of sputtered TiB2 thin films

Effect of substrate rotation on structure, hardness and adhesion of magnetron sputtered TiB2 coating on high speed steel

“…It is known that TiB 2 coatings with the basal plane (001) parallel to the surface exhibits the highest hardness compared to TiB 2 coatings with other orientations [9]. The second problem lies in the high residual stresses evolved in the sputtered coating, which deteriorate the mechanical integrity of the coating-substrate system [1]. Such a problem has recently been tackled by Berger et al [7] by applying a positive bias during sputter deposition of TiB 2 coatings.…”

“…There have been increasing interests in fabrication of this material in thin film and coating forms for many potential applications, for example to reduce wear and corrosion in engineering components and particularly in material processing tools and dies [1][2][3][4][5]. Among the many coating deposition techniques employed so far, non-reactive sputtering from a TiB 2 target is the most widely used for TiB 2 coating fabrication [4 -7].…”

“…Among the many coating deposition techniques employed so far, non-reactive sputtering from a TiB 2 target is the most widely used for TiB 2 coating fabrication [4 -7]. Although the structures and properties of sputter-deposited TiB 2 coatings have been studied by many investigators in recent years [1,3,6,8], the commercialization of sputtered TiB 2 coatings has been hindered mainly due to the difficulties in producing high quality coatings with good mechanical properties suitable for industrial applications.…”

10.1007/s11451-008-1030-3

“…synthesized using physical methods of vapor phase deposition have been studied extensively due to their good physicomechanical properties. An analysis of the data available in the literature [1][2][3][4][5][6][7][8][9][10] has demonstrated that these films are characterized by a columnar structure with a preferred orientation along the 〈 00.1 〉 direction. The specific features of the ordering responsible for the formation of different structures in films prepared from transition metal diborides have remained poorly investigated.…”

Improvement in Adhesion of Sputtered TiB<SUB>2</SUB> Nano-Compostite Coatings onto High Speed Steel by a Chromium Interlayer

“…1) Among the many coating deposition techniques employed so far, non-reactive sputtering from a TiB 2 target is the most widely used for TiB 2 coating fabrication. 2) Although the structures and properties of sputter-deposited TiB 2 coatings have been studied by many investigators in recent years, 3,4) the commercialization of sputtered TiB 2 coatings has been hindered mainly due to the poor adhesion of the coating to the substrate. Indeed, for the coating systems, adhesion or coating adhesion to substrate is certainly the first attribute that a film must possess before any of its other properties can be exploited or achieved.…”