“…In materials grown with molecular beam epitaxy (MBE), fast growth rate and reduced substrate temperatures, , in concert with large V:III flux ratios and surfactant-mediated epitaxy, have been shown to promote substitutional incorporation of B. Similarly, low growth temperatures, ,, high V:III precursor ratios, and optimized precursor chemistry have enabled the highest concentrations of B in metal-organic chemical vapor deposition (MOCVD)-grown B x Ga 1– x As. Despite these optimizations, substitutional B concentrations in BGaAs reported in the literature remain limited to less than ∼8% in both MBE- and MOCVD-grown materials.…”