2018
DOI: 10.1016/j.jcrysgro.2018.02.016
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Growth temperature optimization of GaAs-based In 0.83 Ga 0.17 As on In x Al 1 − x As buffers

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Cited by 9 publications
(7 citation statements)
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“…The cross-hatched patterns are periodic undulations of surface morphology typical of lattice-mismatched heteroepitaxy. Such striations derive from an inhomogeneous strain relaxation process caused by interfacial misfit dislocations buried in the buffer layer [5,15,18,26]. For all samples, we find a similar two-dimensional root mean square (RMS) roughness of the sample surface, with a value of (3.2 ± 1) nm.…”
Section: Resultsmentioning
confidence: 66%
“…The cross-hatched patterns are periodic undulations of surface morphology typical of lattice-mismatched heteroepitaxy. Such striations derive from an inhomogeneous strain relaxation process caused by interfacial misfit dislocations buried in the buffer layer [5,15,18,26]. For all samples, we find a similar two-dimensional root mean square (RMS) roughness of the sample surface, with a value of (3.2 ± 1) nm.…”
Section: Resultsmentioning
confidence: 66%
“…However, the lattice mismatch increases about 4% more for the InGaAs with the same indium content, which can further depredate the performance of the device. The work on In x Ga 1−x As PDs and FPAs of x > 0.53 on GaAs substrate are still done recently by using MBE and MOVPE, including our work [84][85][86][87] and those of other groups. [88,89] The main purpose is to gain the knowledge of higher lattice mismatch.…”
Section: Wavelength-extended Ingaas Pds and Fpasmentioning
confidence: 99%
“…A high crystal quality was obtained due to these buffers, which improved the electrical performance of InGaAs based photodetectors working in the SWIR spectral range. As for the research on improving the growth conditions to improve the crystalline quality of high-In component InGaAs epi-layers, structural and optical properties as well as further growth temperature optimization of GaAs-based In 0.83 Ga 0.17 As materials have been investigated [ 18 ].…”
Section: Introductionmentioning
confidence: 99%