2013
DOI: 10.1021/nl401962q
|View full text |Cite
|
Sign up to set email alerts
|

Guided VLS Growth of Epitaxial Lateral Si Nanowires

Abstract: Using the Au-seeded vapor-liquid-solid technique, epitaxial single-crystal Si nanowires (NWs) can be grown laterally along Si(111) substrates that have been miscut toward [112¯]. The ratio of lateral-to-vertical NWs increases as the miscut angle increases and as disilane pressure and substrate temperature decrease. By exploiting these trends, conditions can be identified whereby all of the deposited Au seeds form lateral NWs. Growth is guided along the nanofaceted substrate via a mechanism that involves pinnin… Show more

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
1
1
1

Citation Types

0
28
0

Year Published

2014
2014
2024
2024

Publication Types

Select...
9

Relationship

0
9

Authors

Journals

citations
Cited by 26 publications
(28 citation statements)
references
References 24 publications
0
28
0
Order By: Relevance
“…32 The preferential movement direction in our experiments might possibly be determined by inhomogeneities on the surface, such as a temperature gradient 33 or a small mis-cut angle. 34 .…”
Section: A Hut Cluster Characterizationmentioning
confidence: 99%
“…32 The preferential movement direction in our experiments might possibly be determined by inhomogeneities on the surface, such as a temperature gradient 33 or a small mis-cut angle. 34 .…”
Section: A Hut Cluster Characterizationmentioning
confidence: 99%
“…[1][2][3][4][5][6][7][8] The integration of semiconductor nanowires into device geometries 9 requires control over their morphology, dimensions, growth orientation, crystal phase and structural defects. Catalytic bottom-up approaches, such as vapor-liquid-solid (VLS) [10][11][12] , vapor-solid-solid (VSS) [13][14] , supercritical fluid-liquid-solid (SFLS) [15][16][17] techniques, are popular routes for growing high-aspect ratio one-dimensional nanostructures [18][19] , where nanowire diameters can be controlled by the dimension of the catalysts. 20 Control over nanowire diameters, in turn, facilitates regulation over their growth orientation.…”
Section: Introductionmentioning
confidence: 99%
“…However, thus far, the reported horizontally grown NWs provide a limited array of electrical and optical properties. In particular, with respect to their optical properties, ZnO, GaN, SnO 2 , In 2 O 3 , Sn‐doped In 2 O 3 (ITO), Mg 2 SiO 4 , and TiO 2 all have bandgap energies above the visible (VIS) range while the bandgap energies of Si, GaAs NWs, InAs, and VO 2 are below it . Therefore, the bandgap energy repertoire of horizontally aligned NWs so far lacks the pivotal VIS range.…”
mentioning
confidence: 99%