2022
DOI: 10.1364/ol.449822
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H-shaped acoustic micro-resonator-based quartz-enhanced photoacoustic spectroscopy

Abstract: An H-shaped acoustic micro-resonator (AmR)-based quartz-enhanced photoacoustic spectroscopy (QEPAS) sensor is demonstrated for the first time. The H-shaped AmR has the advantages of easy optical alignment, high utilization of laser energy, and reduction in optical noise. The parameter of the H-shaped AmR is designed based on the standing wave enhancement characteristic. The performance of the H-shaped AmR-based QEPAS sensor system and bare quartz tuning fork (QTF)-based sensor system are measured under the sam… Show more

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Cited by 93 publications
(73 citation statements)
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“…QTF-based gas sensing technologies, quartzenhanced photoacoustic spectroscopy (QEPAS), and lightinduced thermoelastic spectroscopy (LITES), which were firstly, to the best of our knowledge, reported in 2002 and 2018 by Tittel [11] and Ma [12] , respectively, both use QTF as a detection unit. However, QEPAS requires QTF to be placed in the tested gas environment [13][14][15][16][17][18][19][20] , which means that it is a contact measurement method [21] . This therefore limits its application in some specific areas such as combustion field diagnosis and corrosive gas detection, because the resonance characteristics of QTF will be affected in such conditions [22] .…”
Section: Introductionmentioning
confidence: 99%
“…QTF-based gas sensing technologies, quartzenhanced photoacoustic spectroscopy (QEPAS), and lightinduced thermoelastic spectroscopy (LITES), which were firstly, to the best of our knowledge, reported in 2002 and 2018 by Tittel [11] and Ma [12] , respectively, both use QTF as a detection unit. However, QEPAS requires QTF to be placed in the tested gas environment [13][14][15][16][17][18][19][20] , which means that it is a contact measurement method [21] . This therefore limits its application in some specific areas such as combustion field diagnosis and corrosive gas detection, because the resonance characteristics of QTF will be affected in such conditions [22] .…”
Section: Introductionmentioning
confidence: 99%
“…These vibrations generate a charge distribution due to the piezoelectric effect [11] , [12] , which is collected by the metal pattern deposited on the QTF surface [13] , [14] . Compared with traditional optical trace gas sensing techniques such as tunable diode laser absorption spectroscopy and microphone based photoacoustic spectroscopy, QEPAS provides additional figures of merit, like compactness, laser wavelength independence and immunity to the ambient noise due to the sharp frequency response of the QTF [15] , [16] , [17] , [18] , [19] , [20] , [21] , [22] . A novel QTF-based gas sensing method is light-induced thermoelastic spectroscopy (LITES), which was firstly reported in 2018 [23] .…”
Section: Introductionmentioning
confidence: 99%
“…Laser spectroscopy has been widely used in trace gas detection. The detection sensitivity is up to ppt level [8,9] and the volume is getting smaller [10,11]. In the measurement of atmospheric trace gases, laser heterodyne radiometers (LHRs) have been used extensively, because of their inherent high spectral resolution (υ/Δυ up to approximately 10 8 ), easy system integration, and other characteristics [12].…”
Section: Introductionmentioning
confidence: 99%