Halbleitergassensoren: Trockensynthese und Anwendung

Abstract

Seit der Entwicklung erster Chemiresistorgassensoren auf Metalloxidbasis wurden Wandler mit neuartigen Eigenschaften durch Nass‐ und Trockenabscheidung erzeugt. Der Direktaufbau nanostrukturierter Filme aus der Gasphase verspricht dabei eine einfache Herstellung und Steuerbarkeit, und mit geeigneten Synthese‐ und Abscheidungsmethoden können nm‐ bis μm‐dicke Filme hergestellt werden. Dichte Strukturen werden durch chemische oder Dampfabscheidungsverfahren unter kontrollierten Bedingungen erzeugt, Nanopartikelfilme durch Abscheidung mono‐ oder polydisperser, aggregierter oder agglomerierter Nanopartikel aus einem Gas. Durch schlagartiges Abkühlen während der Synthese lassen sich neuartige Materialien in Nichtgleichgewichts‐ oder substöchiometrischen Zuständen einfangen. Dieser Aufsatz beschreibt die gängigsten Verfahren für die Herstellung von Metalloxid‐Halbleiterdetektoren für chemische Gassensoren. Außerdem wird die Synthese hochporöser Filme mit neuentwickelten Aerosoltechniken diskutiert. Die chemischen und Struktureigenschaften werden der erhaltenen Sensorleistung gegenübergestellt.

Size‐Selective Silver‐Induced Evolution of Mn3O4−Ag Nanocomposites for Effective Ethanol Sensing

“…[62] Semiconducting metal oxides at the nanoscale dimension have received considerable attention for gas sensing applications, owing to the advantages of synthesizing from earth abundant materials, ease of synthesis, high sensitivity and selectivity, and excellent reversibility. [20][21][22][23][24][25][26] The sensing behavior of nanomaterials is based on the principle of adsorption/ desorption of test gases on their surfaces that leads to electrochemical changes, catalytic combustion or resistance modulation of these materials. Based on these conceptives, we have studied the sensing performance of the earth abundant manganese oxides by sensitization with catalytically active silver nanoparticles.…”

“…Metal oxide semiconductors, such as, SnO 2 , In 2 O 3 , TiO 2 , ZnO, CuO, WO 3 and their composites have, often, been exploited as sensing materials of these harmful organic compounds at low concentrations. [20][21][22][23][24][25][26] Noble metal (Ag, Au, Pd and Pt) nanoparticles have, sometimes, been doped or decorated into/on the metal oxide components to improve the sensitivity and selectivity of the desired sensing event. [27][28][29][30][31][32] Considering the earth abundance and biogeneticity, Mn 3 O 4 has received a great deal of attention as the model spinel compound due to its unique physical, chemical and structural properties.…”

One‐Step Rapid and Scalable Flame Synthesis of Efficient WO3 Photoanodes for Water Splitting

“…Flame synthesis is an established technology for the commercial production of nanoparticles like carbon black, fumed silica, and other nanoparticle commodities . The flame synthesis of nanoparticle aerosols and their direct deposition has been applied to the fabrication of ultraporous networks of metal oxide semiconductors for optoelectronic devices . Such films consist of ultrafine nanoparticles and can be rapidly synthesized and directly deposited with more than 90 % porosity .…”

A Designed ZnO@ZIF‐8 Core–Shell Nanorod Film as a Gas Sensor with Excellent Selectivity for H2 over CO

“…Real‐time detection of gases is fundamental to quality control for industrial production applications, environmental protection, and human safety. Gas sensors have played an important role in this process . Hydrogen is an essential component in industrial production and has great prospects for fuel in the future, so the development of H 2 gas sensors is becoming increasingly important, and there is a demand for sensors with high sensitivity and selectivity for H 2 in a complex atmosphere.…”