2010
DOI: 10.1063/1.3499243
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Haptic controlled three-axis MEMS gripper system

Abstract: In this work, we describe the development and testing of a three degree of freedom meso/micromanipulation system for handling micro-objects, including biological cells and microbeads. Three-axis control is obtained using stepper motors coupled to micromanipulators. The test specimen is placed on a linear X-stage, which is coupled to one stepper motor. The remaining two stepper motors are coupled to the Y and Z axes of a micromanipulator. The stepper motor-micromanipulator arrangement in the Y and Z axes has a … Show more

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Cited by 14 publications
(7 citation statements)
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“…In addition, although the average contractile forces were from 42.7 to 79.6 µN, which seems small, with proper strategies (consider the use of light material and driving algorithm) of body material selection, structure design, and control [2,39,40], the bio-actuator can be used to handle small delicate objects.…”
Section: Measurement Of DV Contractile Forcementioning
confidence: 99%
“…In addition, although the average contractile forces were from 42.7 to 79.6 µN, which seems small, with proper strategies (consider the use of light material and driving algorithm) of body material selection, structure design, and control [2,39,40], the bio-actuator can be used to handle small delicate objects.…”
Section: Measurement Of DV Contractile Forcementioning
confidence: 99%
“…Very few control solutions are nevertheless provided by the manufacturer. In this work, the designed controller can be applied to any MEMS based microgripper using a comb drive actuator (Yamahata et al [2006]; Beyeler et al [2007]; Muntwyler et al [2010]; Vijayasai et al [2010]) and leads to new perspectives for high precision micro/nano-manipulation tasks.…”
Section: Features Of the Microgrippermentioning
confidence: 99%
“…Electrostatic comb drive actuators are very common in the development of MEMS-based microgrippers [5]- [7]. They allow a fast positioning of gripping arms over large displacements (several tens of micrometers), they do not produce heating and they have no hysteretic behavior.…”
Section: Introductionmentioning
confidence: 99%
“…In this paper, we focus on the modeling and the robust control of a class of MEMS-based microgrippers using nonlinear comb drive actuators (see examples in [2] and [5]- [7]). The aim is to propose a systematic methodology (from the modeling to the control) aiming at improving, using a low-order controller, the performance of this class of microgrippers considering requirements of microrobotics applications.…”
Section: Introductionmentioning
confidence: 99%