2014
DOI: 10.1088/0022-3727/47/26/263001
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Hard x-ray nanofocusing by multilayer Laue lenses

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Cited by 119 publications
(72 citation statements)
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“…Meeting the damage-limited resolution in biological samples of a few tens of nanometers, as discussed in this paper, needs a lens capable of producing a focal spot of about 10-nm width. The most suitable devices for achieving such spot sizes at these photon energies and with high efficiency are multilayer Laue lenses (MLLs) [35]. These are volume zone plates, made by cutting a structure from Research Article a film made from many thousands of alternating layers of materials produced by sputter deposition.…”
Section: Conceptual Setupmentioning
confidence: 99%
“…Meeting the damage-limited resolution in biological samples of a few tens of nanometers, as discussed in this paper, needs a lens capable of producing a focal spot of about 10-nm width. The most suitable devices for achieving such spot sizes at these photon energies and with high efficiency are multilayer Laue lenses (MLLs) [35]. These are volume zone plates, made by cutting a structure from Research Article a film made from many thousands of alternating layers of materials produced by sputter deposition.…”
Section: Conceptual Setupmentioning
confidence: 99%
“…This is larger than the required 17.5 μm MLL height since the MLL is sliced at a point in the penumbra where the rate is lower, as discussed in Sec. 4.…”
Section: Multilayer Depositionmentioning
confidence: 99%
“…A recent review paper by Yan et al [4] gives the current status of the development of MLLs. The first transmissive structures that were fabricated by layer deposition were thick gratings and zone plates prepared by depositing a multilayer onto a flat substrate [5] or on a thin cylindrical wire [6] and then slicing it to the desired depth along the optic axis.…”
Section: Introductionmentioning
confidence: 99%
“…Recently, X-ray focusing devices such as Fresnel zone plates (FZPs) and Kirkpatrick-Baez mirrors achieving a focused beam size of around 10 nm are being developed as key technologies in the X-ray microscopy [1,2]. The FZP is a circular transmission diffraction grating consisting of alternate transparent and opaque zones whose boundaries are set according to Fresnel zone configuration.…”
Section: Introductionmentioning
confidence: 99%