Herein, the use of Hastelloy C-276 as a cathodic cage for the deposition of thin films on the AISI 316L steel substrate by plasma is investigated. The films are processed through floating potential at 350, 375, 400, and 425 C for 4 h, using a hydrogen-nitrogen mixture in the proportion of 40% and 60%, respectively. The thin films are investigated by X-ray diffraction, scanning electron microscopy, Raman spectroscopy, and potentiodynamic polarization. The spectroscopy results point out the formation of different phases such as FeNi 3 , CrNi, and MoN 1/2 . Films acquired at 375 ºC present superior corrosion resistance with less negative corrosion potential (À0.020 V). The increase and decrease in FeNi 3 and CrNi contents follow the improvement of the applied temperature, which is unbeneficial to the corrosion resistance of the films.