In this paper, we report a novel nanoscale wrinkle-structure fabrication process using fluorocarbon plasma on poly (dimethylsiloxane) (PDMS) and Solaris membranes. Wrinkles with wavelengths of hundreds of nanometers were obtained on these two materials, showing that the fabrication process was universally applicable. By varying the plasma-treating time, the wavelength of the wrinkle structure could be controlled. Highly transparent membranes with wrinkle patterns were obtained when the plasmatreating time was o 125 s. The transmittances of these membranes were 490% in the visible region, making it difficult to distinguish them from a flat membrane. The deposited fluorocarbon polymer also dramatically reduced the surface energy, which allowed us to replicate the wrinkle pattern with high precision onto other membranes without any surfactant coating. The combined advantages of high electron affinity and high transparency enabled the fabricated membrane to improve the performance of a triboelectric nanogenerator. This nanoscale, single-step, and universal wrinkle-pattern fabrication process, with the functionality of high transparency and ultra-low surface energy, shows an attractive potential for future applications in microand nanodevices, especially in transparent energy harvesters.
INTRODUCTIONPatterned surface structures on the nano-or micrometer scale have a significant role in the properties of a material, including physical, mechanical, electrical, and optical 1 . The fabrication process for these patterns has been traditionally realized by photolithography, printing processes, embossing, or writing techniques, of which the relatively high cost and low throughput limit their application for producing complex topologies over large areas. Thereby, selfassembled patterns for large-area patterning, which generally employ physical-chemical or mechanical instabilities within a constrained system to form highly ordered structures, have attracted great attention for many years 2-7 . Among these methods, mechanically inducing a wrinkle structure on a bilayer system is especially suited to creating highly ordered microstructures across a large surface and features convenient fabrication and a tunable wavelength by adjusting the thickness of the stiff layer and the prestrain [8][9][10][11][12] . As a result, wrinkle structures have been used in various applications, such as smart adhesion, liquid/cell shaping, particle assembly, optical surfaces, flexible electronic devices, and energy harvesters [13][14][15][16][17][18][19][20] . To date, most studies involving wrinkling to create ordered structures rely on plasma or ultraviolet-ozonolysis (UVO) oxidation and metal deposition to create the stiff skin. Although these approaches are quite practical, the material properties of the substrate during oxidation can significantly alter the typical morphologies and even block the formation of the wrinkle structure (that is, the process does not have universality to different materials), whereas the deposition of the metal la...