Hartmann wave-front measurement at 134 nm with λ_EUV/120 accuracy

Mercère, Pascal; Zeitoun, Philippe; Idir, Mourad; Pape, S. Le; Douillet, D.; Lévecq, Xavier; Dovillaire, Guillaume; Bucourt, Samuel; Goldberg, Kenneth A.; Naulleau, Patrick; Rekawa, Senajith

doi:10.1364/ol.28.001534

Cited by 97 publications

(89 citation statements)

References 6 publications

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“…This picture is recorded at a wavelength of 2.07nm(600eV) with an exposure time of 1 sec. Note that the rings are smaller at 600eV than 500eV, as in figure 3-7, due to the shorter wavelength and thus reduced divergence angle as seen in equation (3)(4)(5)(6)(7)(8)(9)(10). 46…”

Section: -8mentioning

confidence: 98%

“…This highly absorptive nature, however, creates great difficulties in taking accurate visibility measurements, and thus β, of this material. A density, ρ, of 11.914 (g/cm 3 ) and atomic weight, A, of 114.40 g/mole were used in these calculations. 3 .…”

Section: -9mentioning

confidence: 99%

“…A density, ρ, of 11.914 (g/cm 3 ) and atomic weight, A, of 114.40 g/mole were used in these calculations. 3 . RBS measurement courtesy of Motorola.…”

Section: -9mentioning

confidence: 99%

“…The sample used had a thickness of 350nm and a RBS determined density of 5.891g/cm 3 . Note the increase in the magnitude of the error bars at energies higher than the absorption edge.…”

Section: -9mentioning

confidence: 99%

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Tunable coherent radiation at soft X-ray wavelengths: Generation and interferometric applications

Rosfjord

2004

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The availability of high power, spectrally and spatially coherent soft x-rays (SXR) would facilitate a wide variety of experiments as this energy region covers the primary resonances of many magnetic and biological materials. Specifically, there are the carbon and oxygen K-edges that are critical for biological imaging in the water window and the L-edges of iron, nickel, and cobalt for which imaging and scattering studies can be performed.A new coherent soft X-ray branchline at the Advanced Light Source has begun operation (beamline 12.0.2). Using the third harmonic from an 8 cm period undulator, this branch delivers coherent soft x-rays with photon energies ranging from 200eV to 1keV. This branchline is composed of two sub-branches one at 14X demagnification and the other 8X demagnification. The former is optimized for use at 500eV and the latter at 800eV. Here the expected power from the third harmonic of this undulator and the beamline design and characterization is presented. The characterization includes measurements on available photon flux as well as a series of double pinhole experiments to determine the coherence factor with respect to transverse distance. The first high quality Airy patterns at SXR wavelengths are created with this new beamline.The operation of this new beamline allows for interferometry to be performed in the SXR region. Here an interferometric experiment designed to directly determine the index of refraction of a material under test is performed.Measurements are first made in the EUV region using an established beamline (beamline12.0.1) to measure silicon, ruthenium and tantalum silicon nitride. This work is then extended to the SXR region using beamline 12.0.2 to test chromium and vanadium.

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Section: -8mentioning

confidence: 98%

Section: -9mentioning

confidence: 99%

“…A density, ρ, of 11.914 (g/cm 3 ) and atomic weight, A, of 114.40 g/mole were used in these calculations. 3 . RBS measurement courtesy of Motorola.…”

Section: -9mentioning

confidence: 99%

“…The sample used had a thickness of 350nm and a RBS determined density of 5.891g/cm 3 . Note the increase in the magnitude of the error bars at energies higher than the absorption edge.…”

Section: -9mentioning

confidence: 99%

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Tunable coherent radiation at soft X-ray wavelengths: Generation and interferometric applications

Rosfjord

2004

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“…The Marechal's criterion [8] stands that a beam is diffraction-limited at a given wavelength, , when the root-mean-square (rms) wave front aberration is lower than /14. EUV wave-front can be reconstructed by several techniques [8,9]. In these experiments we have used the so-called Hartmann techniques.…”

Section: Introductionmentioning

confidence: 99%

High harmonics generation: Spatial characterisation and applications

Gautier

Zeitoun

Morlens

et al. 2009

UVX 2008 - 9e Colloque Sur Les Sources Cohérentes Et Incohérentes UV, VUV Et X : Applications Et Développements Récents

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Abstract. We present a full optimization of the high harmonics wave-front thanks to the use of a soft x-ray Hartmann sensor. The sensor was calibrated using high harmonics source with a /50 accuracy. We observed relatively good high harmonics wave-front, two times the diffraction-limit, with astigmatism as the dominant aberration for any interaction parameters.The influence of high harmonic generation parameters was also studied in particularly the influence of the infra-red wave-front. This wave front quality allows applications by focalization of this beam. We present experiment we performed on damage target and holography.

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