Cu 2 (In,Ga)Se 2 thin-film solar cells with Zn(O,S) buffer layers have become the focus of industries due to their favorable features, in particular, their high efficiency. However, the frequently reported light soaking (LS) effect, as a photoinduced metastable phenomenon, was one of the most serious problems suffered by Zn(O,S)/CIGS devices. Unfortunately, the mechanism behind this has not yet been completely revealed. In this paper, the surface components of the submicron CIGS absorption layer (∼970 nm) were carefully regulated, thereby effectively suppressing the photoinduced metastable effect on Zn(O,S)/CIGS solar cells. It can be found from the features of the surface and the parameters of corresponding solar devices that an appropriate surface component (GGI ∼ 0.348, CGI ∼ 0.894) can not only effectively mitigate the LS effect but also increase the conversion efficiency of solar cells, especially the evolution of fill factor, which is impressive. Finally, the combination of appropriate surface regulation and an anti-reflection layer of MgF 2 enables us to obtain a 17.6% Cd-free submicron CIGS solar cell with a significantly lower LS effect, representing the highest value in submicron CIGS solar devices. It is hoped that this paper can pave the way for the CIGS absorber layer to suppress the metastable effect.