Heat and mass-transfer modeling of an angled gas-jet LCVD system

Thermodynamics, Kinetics, and Microstructure of Laser Chemical Vapor Deposition of SiC

“…All deposits were prepared using an automated LCVD system, which has previously been described in detail 17,18 . Briefly, a 200 μm diameter Gaussian CO 2 laser beam was used to heat a spot on a graphite (SK‐85) substrate.…”

SiC line deposition using laser CVD

“…A detailed description of the Georgia Tech LCVD system can be found elsewhere (Duty et al, 2001(Duty et al, , 2003. The novelty of this system is the addition of an angled gas jet, which is used to deliver reagents directly to the reaction zone to enhance the deposition rate.…”

“…The volcano effect refers to the depression at the top of the deposit, which makes the morphology of deposits similar to a volcano. Because of the Gaussian energy distribution of the laser beam and heat conduction within the substrate, there is a large temperature gradient across the reaction zone on the substrate during LCVD deposition (Duty et al, 2003). This high temperature gradient was reported as the major cause of the volcano effect for LCVD SiC fibers (Mi et al, 2006).…”

Multi‐material and advanced geometry deposition via laser chemical vapor deposition

“…It was previously determined during these simulations that there was no significant effect from convection. 5,6 The temperature distributions provided by these models should yield the information necessary to determine what materials may be deposited with the laser. Two different models were created, one utilizing twodimensional geometry and an estimation factor for the gas jet, and the other was created in three dimensions with actual mass flow representing the gas jet.…”