2017
DOI: 10.1002/pssa.201700204
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Heat flow across an oxide layer in Si

Abstract: Oxide layers are ubiquitous in Si technology including nanostructures. How such layers interact with heat flow is not well understood. In this contribution, we present the preliminary results of ab initio molecular-dynamic simulations of such interactions. We show that oxide layers reflect (part of) the incoming heat, which results in the accumulation of energy on the warmer side of the layer for longer times than without the presence of the oxide. The results are consistent with earlier predictions that phono… Show more

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Cited by 5 publications
(5 citation statements)
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“…4,5 The main barriers to heat dissipation in SOI devices are largely attributed to the thermal resistances (i) in the bulk of the SiO2 layer, and (ii) at the interface of Si and SiO2 layers (Si/SiO2 interface). 6 To assess the relative significance of these two resistances, a few studies have examined the heat transfer across the Si/SiO2 interface, [6][7][8][9][10] with only one 6 investigating the modal contributions to the thermal interface conductance (TIC). TIC is also denoted by G , where QT G   ( Q , and T  representing the heat flux through the interface and the temperature change across the interface (i.e., Kapitza resistance 11 ), respectively).…”
Section: Textmentioning
confidence: 99%
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“…4,5 The main barriers to heat dissipation in SOI devices are largely attributed to the thermal resistances (i) in the bulk of the SiO2 layer, and (ii) at the interface of Si and SiO2 layers (Si/SiO2 interface). 6 To assess the relative significance of these two resistances, a few studies have examined the heat transfer across the Si/SiO2 interface, [6][7][8][9][10] with only one 6 investigating the modal contributions to the thermal interface conductance (TIC). TIC is also denoted by G , where QT G   ( Q , and T  representing the heat flux through the interface and the temperature change across the interface (i.e., Kapitza resistance 11 ), respectively).…”
Section: Textmentioning
confidence: 99%
“…Mahajan et al 7 , Lampin et al 8 and Chen et al 12 all employed non-equilibrium molecular dynamics (NEMD) method to obtain a temperature jump at the interface of Si/SiO2 and used the above definition of G to evaluate the TIC. Stanley et al 9,10 used a modified approach to non-equilibrium heat transfer implemented in a first-principles MD simulation to capture the TIC across the Si/SiO2 interface, however neither of the above groups analyzed the modal contributions to the TIC. Only Deng et al 6 quantified the modal contributions to the heat transfer across Si/SiO2 interface by employing the wave packet (WP) dynamics approach.…”
Section: Textmentioning
confidence: 99%
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“…The numbers differ slightly from those in ref. [12] because we extended the runs to 15 ps and averaged over more initial microstates.…”
Section: Heat Flowmentioning
confidence: 99%
“…Preliminary results of such heat flow (8 ps simulation for a single temperature window) are in ref. [12].…”
Section: Introductionmentioning
confidence: 99%