Heat Resistance Improvement of Deposited Vinylidene Fluoride Oligomer Based-Infrared Sensors by Parylene C Coating

Sutani, Yohei; Fukushima, T.; Mori, A.; Koshiba, Yasuko; Kodani, Takahiko; Kanemura, Tokunori; Ishida, Kenji

doi:10.7567/ssdm.2019.ps-7-13

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2020

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“…Additionally, we investigated the thermal stability of the sensor. In addition to the comparison of the electrical characteristics before and after the thermal treatment, 23) the temperature dependence of the sensor characteristics and the comparison of the structural changes before and after the heat resistance test were evaluated.…”

Section: Introductionmentioning

confidence: 99%

Improvement of thermal stability of an organic pyroelectric infrared sensor with Parylene C coating

Sutani

Fukushima

Mori

et al. 2020

Jpn. J. Appl. Phys.

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We fabricated a protective Parylene C layer coated with vinylidene fluoride (VDF) oligomer thin films to improve their thermal stability and investigated the temperature dependence of their pyroelectric properties. Following the heat resistance test (at 398 K for 500 h in the presence of air at atmospheric pressure), the deterioration of voltage sensitivity of the Parylene C coated sensor was approximately 20% (553 → 430 V W −1 ) and approximately 100% in the case of the sensor without Parylene C ( 551→ 0.86 V W −1 ). Parylene C coating prevented structural disturbances of VDF oligomer thin films and electrode cracking. Comparison of the VDF oligomer, Parylene-C-coated VDF oligomer, and Parylene-C-coated P (VDF-TrFE), demonstrated the superior thermal stability of the Parylene-C-coated VDF oligomeric pyroelectric sensor.

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Section: Introductionmentioning

confidence: 99%