Heating Concepts for Ceramic Microreactors

Knitter, Regina; Lurk, Ralf; Rohde, Magnus; Stolz, Stefan; Winter, V.

doi:10.1007/978-3-642-56763-6_10

Cited by 8 publications

(3 citation statements)

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“…For parts of the same material or materials with at least matching sintering and thermal expansion characteristics this can be achieved by joining in the green state and subsequent cofiring [66,67]. For parts of the same material or materials with at least matching sintering and thermal expansion characteristics this can be achieved by joining in the green state and subsequent cofiring [66,67].…”

Section: Joining and Sealingmentioning

confidence: 99%

“…Differently shaped, multichannel catalyst carrier plates may be used for a rapid screening of catalysts, and flow distributors or different static mixers can be exchanged in the reactor housing (see also Fig. In addition, the reactors can be equipped with internal or external heating elements made either by screenprinting or LPIM and that allow the reactor to be heated to 1000 8C by inductive coupling or from direct current flow [66,86]. Sealing of the reactor housing was accomplished for normal pressure by pressing on a polished lid with a ceramic clamping device.…”

Section: Applicationsmentioning

confidence: 99%

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Microfabrication in Ceramics and Glass

Knitter

Dietrich

2006

Advanced Micro and Nanosystems

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The use of ceramics and glass as reactor materials is very promising for hightemperature and corrosive applications in microprocess engineering. Ceramic materials in particular demand more effort in the fabrication processes and joining techniques than metals or silicon. Notwithstanding these obstacles, several components have already been developed and successfully applied for chemical or thermal applications. Glass microreactors have been developed and manufactured over recent years by several companies. Several techniques, such as sand blasting, standard photolithography with wet etching have been used, as well as mechanical methods. A very interesting material is a photostructurable glass like FOTURAN, which allows the very accurate manufacture of fine channels and chambers with high aspect ratio. The manufactured structures are connected by diffusion bonding to form three-dimensional channel structures.

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Section: Joining and Sealingmentioning

confidence: 99%

Section: Applicationsmentioning

confidence: 99%

Microfabrication in Ceramics and Glass

Knitter

Dietrich

2006

Advanced Micro and Nanosystems

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“…Heating devices range from millimeters to several centimeters, so-called meso-hotplates, have been widely studied and utilized for many applications: gas and flow sensors [1,2], micro power generators [3][4][5], frequency-stabilized lasers [6], discharge lamps for atomic clocks and magnetometers [7] and microfluidics [3,8,9], just to name a few. Such meso-hotplates typically contain metallic or resistive heaters fabricated on a thermomechanically decoupled area of a dielectric substrate.…”

Section: Introductionmentioning

confidence: 99%

Meso-scale ceramic hotplates – A playground for high temperature microsystems

Jiang

Muralt

Maeder

2015

Sensors and Actuators B: Chemical

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Microchemical Engineering: Components, Plant Concepts User Acceptance – Part I

Hessel¹,

Löwe

2003

Chem Eng & Technol

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Over the last five years, many activities have focused on the unexploited field of carrying out reactions on small scales. Due to the rapid development of new components, this paper deals with recent developments only in a compressed form. An important point is the analysis of possible plant concepts for microreactors and whether these are a sensible option. Due to the enormous difference in size between the microchannels and the fluid periphera of possible components this is not just a technical question. It touches on the microtechnology concept as a whole. The direction in which the field should be developed and which measures can be taken to influence its development are questions that are addressed here with respect to the big industrial interest in microreactors.

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Heating Concepts for Ceramic Microreactors

Cited by 8 publications

References 1 publication

Microfabrication in Ceramics and Glass

Microfabrication in Ceramics and Glass

Meso-scale ceramic hotplates – A playground for high temperature microsystems

Microchemical Engineering: Components, Plant Concepts User Acceptance – Part I

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