2023
DOI: 10.1016/j.radphyschem.2023.110927
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Helium ions irradiation of tantalum-zirconium carbide thin films: The effect of acetylene gas contents

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Cited by 2 publications
(1 citation statement)
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“…However, despite the prospects for using thin-film coatings as anti-corrosion protective materials, a number of problems remain, the solution of which will increase the service life of materials, as well as enhance their resistance to mechanical damage and high-temperature heating. One way to solve this problem is to use the methods of ion or radiation modification using low-energy ions or electron radiation [14][15][16]. This modification is based on the hypothesis that, during the interaction of incident charged particles (ions) with the crystal structure of thin films, energy transfer processes, accompanied by energy transformation of kinetic energy into thermal energy, lead to structural changes in film coatings and their hardening.…”
Section: Introductionmentioning
confidence: 99%
“…However, despite the prospects for using thin-film coatings as anti-corrosion protective materials, a number of problems remain, the solution of which will increase the service life of materials, as well as enhance their resistance to mechanical damage and high-temperature heating. One way to solve this problem is to use the methods of ion or radiation modification using low-energy ions or electron radiation [14][15][16]. This modification is based on the hypothesis that, during the interaction of incident charged particles (ions) with the crystal structure of thin films, energy transfer processes, accompanied by energy transformation of kinetic energy into thermal energy, lead to structural changes in film coatings and their hardening.…”
Section: Introductionmentioning
confidence: 99%