Hermetic integration of liquids in MEMS by room temperature, high-speed plugging of liquid-filled cavities at wafer level

Antelius, Mikael; Fischer, Andreas; Niklaus, Frank; Stemme, G.; Roxhed, Niclas

doi:10.1109/memsys.2011.5734435

Cited by 8 publications

(9 citation statements)

References 9 publications

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“…This detection system can be used in micro-electromechanical systems (MEMS) devices and biomedical applications for traceable flow rates as low as 1

L/min. Antelius, et al (2011) used another vacuum system to detect leaks as small as 1.4 × 10 −8 Pa L/s (hole diameter 24

m, noise level of the detector 1 × 10 −8 Pa L/s) in a MEMS-based hermetic liquid integration device fabricated on a silicon wafer. Depending on the detection method used, finding the exact location of a leak may be difficult.…”

Section: Types Of Leakage Testingmentioning

confidence: 99%

Overcoming technological barriers in microfluidics: Leakage testing

Silvério

Guha

Keiser

et al. 2022

Front. Bioeng. Biotechnol.

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The miniaturization of laboratory procedures for Lab-on-Chip (LoC) devices and translation to various platforms such as single cell analysis or Organ-on-Chip (OoC) systems are revolutionizing the life sciences and biomedical fields. As a result, microfluidics is becoming a viable technology for improving the quality and sensitivity of critical processes. Yet, standard test methods have not yet been established to validate basic manufacturing steps, performance, and safety of microfluidic devices. The successful development and widespread use of microfluidic technologies are greatly dependent on the community’s success in establishing widely supported test protocols. A key area that requires consensus guidelines is leakage testing. There are unique challenges in preventing and detecting leaks in microfluidic systems because of their small dimensions, high surface-area to volume ratios, low flow rates, limited volumes, and relatively high-pressure differentials over short distances. Also, microfluidic devices often employ heterogenous components, including unique connectors and fluid-contacting materials, which potentially make them more susceptible to mechanical integrity failures. The differences between microfluidic systems and traditional macroscale technologies can exacerbate the impact of a leak on the performance and safety on the microscale. To support the microfluidics community efforts in product development and commercialization, it is critical to identify common aspects of leakage in microfluidic devices and standardize the corresponding safety and performance metrics. There is a need for quantitative metrics to provide quality assurance during or after the manufacturing process. It is also necessary to implement application-specific test methods to effectively characterize leakage in microfluidic systems. In this review, different methods for assessing microfluidics leaks, the benefits of using different test media and materials, and the utility of leakage testing throughout the product life cycle are discussed. Current leakage testing protocols and standard test methods that can be leveraged for characterizing leaks in microfluidic devices and potential classification strategies are also discussed. We hope that this review article will stimulate more discussions around the development of gas and liquid leakage test standards in academia and industry to facilitate device commercialization in the emerging field of microfluidics.

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“…This detection system can be used in micro-electromechanical systems (MEMS) devices and biomedical applications for traceable flow rates as low as 1

L/min. Antelius, et al (2011) used another vacuum system to detect leaks as small as 1.4 × 10 −8 Pa L/s (hole diameter 24

Section: Types Of Leakage Testingmentioning

confidence: 99%

Overcoming technological barriers in microfluidics: Leakage testing

Silvério

Guha

Keiser

et al. 2022

Front. Bioeng. Biotechnol.

View full text Add to dashboard Cite

show abstract

“…This can be accomplished by fabricating and hermetically sealing the component in an inert environment. In this regard, advancements for the packaging of MEMS components can potentially be leveraged [66,67].…”

Section: Commercialization Issuesmentioning

confidence: 99%

Liquid-Metal-Based Reconfigurable Components for RF Front Ends

et al. 2015

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All Rights Reserved AcknowledgmentsI feel that this is a rare opportunity for me to share a bit of candidness and hope to make the most of it. I truly owe the completion of this thesis to many friends and family members and am sorry that I cannot thank you all. hope we can all stay in touch and get a bite and a drink together every once in a while. To leave off I would like to quote Andy Morishita and say "memories are made together" and I will always cherish these past few years we all had. This thesis focuses on the development of liquid-metal-based reconfigurable components for radio-frequency (RF) front ends. Reconfigurable components allow the RF front end to dynamically change key radio parameters such as output power, signal carrier frequency, and bandwidth. These capabilities enable the radio transceiver to adapt to environmental and communication channel changes on the fly, according to programmed protocols and priorities. As a low-loss metallic conductor, the liquid metal Galinstan is well suited for RF applications, and its fluidic nature makes it a natural candidate for reconfigurable architectures. Three liquid-metal based components are described: a frequency-tunable substrate integrated waveguide cavity filter, an electromagnetic bandgap phase shifter, and a frequency-reconfigurable slot antenna. These components are designed, fabricated, and tested and the advantages and disadvantages of using liquid metal are discussed. iv

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“…Recently, MEMS devices encapsulating liquid inside have been developed, which exploits unique characteristics of liquids that are deformable and can form spherical shape due to the surface tension [31][32][33][34][35]. Liquid encapsulation processes have also been developed, including deposition of parylene directly onto nonvolatile liquid [31], bonding-in-liquid technique (BiLT) [33][34][35], and sealing with gold wire [36].…”

Section: Introductionmentioning

confidence: 99%

A Flexible Capacitive Sensor with Encapsulated Liquids as Dielectrics

2012

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Flexible and high-sensitive capacitive sensors are demanded to detect pressure distribution and/or tactile information on a curved surface, hence, wide varieties of polymer-based flexible MEMS sensors have been developed. High-sensitivity may be achieved by increasing the capacitance of the sensor using solid dielectric material while it deteriorates the flexibility. Using air as the dielectric, to maintain the flexibility, sacrifices the sensor sensitivity. In this paper, we demonstrate flexible and highly sensitive capacitive sensor arrays that encapsulate highly dielectric liquids as the dielectric. Deionized water and glycerin, which have relative dielectric constants of approximately 80 and 47, respectively, could increase the capacitance of the sensor when used as the dielectric while maintaining flexibility of the sensor with electrodes patterned on flexible polymer substrates. A reservoir of liquids between the electrodes was designed to have a leak path, which allows the sensor to deform despite of the incompressibility of the encapsulated liquids. The proposed sensor was microfabricated and demonstrated successfully to have a five times greater sensitivity than sensors that use air as the dielectric.

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Hermetic integration of liquids in MEMS by room temperature, high-speed plugging of liquid-filled cavities at wafer level

Cited by 8 publications

References 9 publications

Overcoming technological barriers in microfluidics: Leakage testing

Overcoming technological barriers in microfluidics: Leakage testing

Liquid-Metal-Based Reconfigurable Components for RF Front Ends

A Flexible Capacitive Sensor with Encapsulated Liquids as Dielectrics

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