Heteroepitaxial growth of ZnO films on diamond (111) plane by magnetron sputtering

Hachigo, A.; Nakahata, H.; Higaki, K.; Fujii, Satoshi; Shikata, Shinichi

doi:10.1063/1.112634

Cited by 83 publications

(38 citation statements)

References 14 publications

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“…The growth of ZnO thin films has been studied early on for acoustical and optical devices because of their excellent piezoelectric properties and a tendency to grow with strong (0001) preferential orientation on various substrates, including glass [38], sapphire [39], and diamond [40]. Early growth experiments with magnetron sputtering [39,41], and chemical vapor deposition (CVD) [42][43][44] led to polycrystalline films.…”

Section: Epitaxial Growth Of Zno Filmsmentioning

confidence: 99%

Preparation and properties of ZnO and devices

Izyumskaya

Avrutin

Özgür

et al. 2007

Physica Status Solidi (b)

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ZnO has gained interest in part because of its large exciton binding energy (60 meV), good for lasing with low threshold. The renewed interest in ZnO is fuelled by availability of high quality substrates, reports of p-type conductivity, and ferromagnetic behavior when doped with transitions metals. The field is also fuelled by theoretical predictions and perhaps experimental confirmation of ferromagnetism at room temperature for potential spintronics applications. Despite great strides there are still many challenges, the chief among them is the attainment of reproducibly low resistivity p-type ZnO. While ZnO already has many industrial applications owing to its piezoelectric properties and bandgap in the near UV, its applications to optoelectronic devices utilizing electrical injection has not yet been put to practice mainly due to the lack of p-type epitaxial layers. This review provides a discussion of some of the growth issues of ZnObased epitaxial and heteroepitaxial layers and their use in a variety of devices.

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Section: Epitaxial Growth Of Zno Filmsmentioning

confidence: 99%

Preparation and properties of ZnO and devices

Izyumskaya

Avrutin

Özgür

et al. 2007

Physica Status Solidi (b)

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“…In comparison to the many other methods suitable for ZnO thin film preparation like MBE [9], MOCVD [10], RF sputtering [11], the PLD has some advantages [12][13][14]. To produce defect-free material synthesized from laser ablation, the main features of pulsed laser deposition are the chemical purity, lower substrate temperatures, and the possibility to introduce reactive or other type of atmosphere during deposition.…”

Section: Introductionmentioning

confidence: 99%

Growth and characterization of pulsed laser deposited ZnO thin films

et al. 2007

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Abstract:One of the most important and promising materials from metal oxides is ZnO with specific properties for near UV emission and absorption optical devices. The properties of ZnO thin films strongly depend on the deposition method. Among them, pulsed laser deposition (PLD) plays an important role for preparing various kinds of ZnO films, e.g. doped, undoped, monocrystalline, and polycrystalline. Different approaches -ablation of sintered ZnO pellets or pure metallic Zn as target material are described. This contribution is comparing properties of ZnO thin films deposited from pure Zn target in oxygen atmosphere and those deposited from sintered ZnO target. There is a close connection between final thin film properties and PLD conditions. The surface properties of differently grown ZnO thin films are measured by secondary ion mass spectrometry (SIMS), atomic force microscopy (AFM) and scanning electron microscopy (SEM). Furthermore, different approaches -ablation of sintered ZnO pellet or pure metallic Zn as target materials are described. The main results characterize typical properties of ZnO films versus technological parameters are presented.

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“…Recently, special attention has been devoted to the morphology, as ZnO can form different nanostructures [10]. Thermal stability, irradiation resistance, and flexibility to form different nanostructures are the advantages that expedite its potential wide applications in photodetectors [11][12][13], surface acoustic wave devices [14], ultraviolet nanolaser [15], varistors [16], solar cells [17], gas sensors [18], biosensors [19], ceramics [20,21], field emission [22], and nanogenerator [23]. Cyt c plays an important role in the biological respiratory chain, whose function is to receive electrons from Cyt c reductase and deliver them to Cyt c oxidase.…”

Section: Introductionmentioning

confidence: 99%

Direct Electron Transfer of Cytochrome c on ZnO Nanoparticles Modified Carbon Paste Electrode

et al. 2012

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The direct electrochemistry of cytochrome c (cyt c) immobilized on a modified carbon paste electrode (CPE) was described. The electrode was modified with ZnO nanoparticles. Direct electrochemistry of cytochrome c in this paste electrode was easily achieved, and a pair of well-defined quasireversible redox peaks of a heme Fe (III)/Fe(II) couple appeared with a formal potential (E 0 ) of −0.303 V (versus SCE) in pH 7.0 phosphate buffer solution (PBS). The fabricated modified bioelectrode showed good electrocatalytic ability for reduction of H 2 O 2 . The preparation process of the proposed biosensor was convenient, and the resulting biosensor showed high sensitivity, low detection limit, and good stability.

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Heteroepitaxial growth of ZnO films on diamond (111) plane by magnetron sputtering

Cited by 83 publications

References 14 publications

Preparation and properties of ZnO and devices

Preparation and properties of ZnO and devices

Growth and characterization of pulsed laser deposited ZnO thin films

Direct Electron Transfer of Cytochrome c on ZnO Nanoparticles Modified Carbon Paste Electrode

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