Heterogeneously Integrated Aluminum Nitride<scp>MEMS</scp>Resonators and Filters

Calayir, Enes; Merugu, Srinivas; Lee, Jaewung; Singh, Navab; Piazza, Gianluca

doi:10.1002/9783527823239.ch7

Cited by 5 publications

(1 citation statement)

References 34 publications

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“…These materials are cheaper than single-crystal thin-films, are compatible with CMOS Back-End Of the Line (BEOL) processes 18 , and are currently used in state-ofthe-art resonators for filtering applications. Monolithic integration of AlN resonators for filters, oscillators, fingerprint sensors, and energy harvesting applications has been successfully demonstrated 18,19 . Despite the lack of available literature, post-CMOS compatibility of ScAlN is widely accepted within the community, due to the similarity in deposition conditions and machining between AlN and ScAlN [20][21][22] .…”

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confidence: 99%

Compact and wideband nanoacoustic pass-band filters for future 5G and 6G cellular radios

Giribaldi,

Colombo,

Simeoni

et al. 2024

Nat Commun

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Over recent years, the surge in mobile communication has deepened global connectivity. With escalating demands for faster data rates, the push for higher carrier frequencies intensifies. The 7–20 GHz range, located between the 5G sub-6 GHz and the mm-wave spectra, provides an excellent trade-off between network capacity and coverage, and constitutes a yet-to-be-explored range for 5G and 6G applications. This work proposes a technological platform able to deliver CMOS-compatible, on-chip multi-frequency, low-loss, wide-band, and compact filters for cellular radios operating in this range by leveraging the micro-to-nano scaling of acoustic electromechanical resonators. The results showcase the first-ever demonstrated low insertion loss bank of 7 nanoacoustic passband filters in the X-band. Most of the filters showcase fractional bandwidths above 3% and sub-dB loss per stage in an extremely compact form factor, enabling the manufacturing of filters and duplexers for the next generation of mobile handsets operating in the X-band and beyond.

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confidence: 99%