High-accuracy aspheric x-ray mirror metrology using Software Configurable Optical Test System/deflectometry

Huang, Run; Su, Peng; Burge, James H.; Huang, Lei; Idir, Mourad

doi:10.1117/1.oe.54.8.084103

Cited by 51 publications

(25 citation statements)

References 25 publications

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“…PMD can generally achieves only micrometer‐level accuracy with low orders included. [ 143 ] Great effort has been made on calibration to get higher accuracy measurement of lower orders such as incorporation of a laser tracker, [ 145 ] use of multiple measurements of a well‐calibrated reference mirror, [ 143,147 ] and the computer‐aided reverse optimization with iterative ray tracing. [ 148 ] The measurement accuracy of PMD was much closer to that of interferometry.…”

Section: Non‐interferometric Areal Measurementmentioning

confidence: 99%

Measurement of Freeform Optical Surfaces: Trade‐Off between Accuracy and Dynamic Range

Chen

Xue

Zhai

et al. 2020

Laser & Photonics Reviews

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Freeform optical surfaces are advantageous to optical designers, as they provide additional degrees of freedom for optimization. The loss of rotational symmetry, however, makes measurement of freeforms more challenging. Herein, advances in interferometric areal measurement of freeform optical surfaces, including null tests, non-null tests, near-null tests, and adaptive null tests, are reviewed. Some new developments, in the Hartmann test, deflectometry, and phase retrieval, as representatives of non-interferometric areal measurement, are then presented. Overall, the focus is on single-point-probe-based profilometry categorized into coordinate measurements and slope-or curvature-based measurements. Innovative measurement technology is trying to bridge the gap between high accuracy and high dynamic range as freeform optical surfaces are finding more applications in visible and shorter-wavelength optics.

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Section: Non‐interferometric Areal Measurementmentioning

confidence: 99%

Measurement of Freeform Optical Surfaces: Trade‐Off between Accuracy and Dynamic Range

Chen

Xue

Zhai

et al. 2020

Laser & Photonics Reviews

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“…However, the dynamic range of the interferometric testing is quite small, and it can only measure the surface departure within a few wavelengths from reference shape [8,9]. Specifically designed null optics and compensation optics are generally required in the testing of complex surfaces with large aberration, making the testing system very costly and inflexible [10][11][12].…”

Section: Introductionmentioning

confidence: 99%

General testing method for refractive surfaces based on reverse Hartmann test

Wang

Gong

et al. 2017

Applied Optical Metrology II

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The testing technique with high dynamic range is required to meet the measurement of refractive wavefront with large distortion from test refractive surface. A general deflectometric method based on reverse Hartmann test is proposed to test refractive surfaces. Ray tracing of the modeled testing system is performed to reconstruct the refractive wavefront from test surface, in which computer-aided optimization of system geometry is performed to calibrate the geometrical error. For the refractive wavefront error with RMS 255 μm, the testing precision better than 0.5 μm is achieved.

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“…The DM's shape is optimized using the stochastic parallel gradient descent (SPGD) algorithm [8]. The updating DM is precisely measured using an in situ deflectometry system (DS), which includes a display screen and camera [7,9]. This unique in situ adaptive null measurement approach overcomes the limited accuracy/precision issue of a typical DM in the context of adaptive interferometry.…”

mentioning

confidence: 99%

Adaptive interferometric null testing for unknown freeform optics metrology

et al. 2016

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We report an adaptive interferometric null testing method for overcoming the dynamic range limitations of conventional null testing approaches during unknown freeform optics metrology or optics manufacturing processes that require not-yet-completed surface measurements to guide the next fabrication process. In the presented adaptive method, a deformable mirror functions as an adaptable null component for an unknown optical surface. The optimal deformable mirror's shape is determined by the stochastic parallel gradient descent algorithm and controlled by a deflectometry system. An adaptive interferometric null testing setup was constructed, and its metrology data successfully demonstrated superb adaptive capability in measuring an unknown surface.

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High-accuracy aspheric x-ray mirror metrology using Software Configurable Optical Test System/deflectometry

Cited by 51 publications

References 25 publications

Measurement of Freeform Optical Surfaces: Trade‐Off between Accuracy and Dynamic Range

Measurement of Freeform Optical Surfaces: Trade‐Off between Accuracy and Dynamic Range

General testing method for refractive surfaces based on reverse Hartmann test

Adaptive interferometric null testing for unknown freeform optics metrology

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