High-accuracy EUV metrology of PTB using synchrotron radiation

Scholze, Frank; Beckhoff, Burkhard; Brandt, G. Mirek; Fliegauf, R.; Gottwald, Alexander; Klein, R.; Meyer, Bernd; Schwarz, Udo D.; Thornagel, R.; Tuemmler, Johannes; Vogel, Klaus; Weser, J.; Ulm, G.

doi:10.1117/12.436766

Cited by 64 publications

(30 citation statements)

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“…Monochromatized synchrotron radiation in the PhysikalischTechnische Bundesanstalt (PTB) laboratory at the storage ring BESSY II [12] was used for the measurements. For the photon energy range from 0.1 keV to 1.9 keV, a plane grating monochromator [13] was used and a four-crystal monochromator (FCM) [14] for the energy range from 1.8 keV to 10 keV. With the photon energy increasing from 0.1 keV to 1.9 keV, the energy width of the grating monochromator increases from 0.05 eV to 1.5 eV.…”

Section: Methodsmentioning

confidence: 99%

Modelling the response function of energy dispersive X‐ray spectrometers with silicon detectors

2009

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A new, analytical description of the physical processes determining the spectral response of an energy dispersive X-ray spectrometer with a silicon detector (Si(Li) or silicon drift detector (SDD)) is presented. The model considers the detector statistical noise, the electronic noise, the incomplete charge collection (ICC) that gives rise to the peak tailing, the escape effect, the fluorescence of the front contact or the dead layer and hot photoelectrons that cause the shelf. Only five free parameters are necessary to model the response function: the electronic noise, three parameters describing the shape of the charge collection efficiency beneath the front contact and the thickness of the detector front layer. Once the five parameters are adjusted to have agreement between a measured and a calculated response function, the response function can be calculated for any other photon energy in the range from 0.1 keV to 30 keV.The algorithm is implemented in IDL and MATLAB and is available also as MATLAB stand-alone program. It enables the determination of the optimum parameter set by fitting a calculated response function to a measured one for monochromatic radiation. A (m,n)-type matrix can be calculated whereby m represents the number of channels for the response function and n the number of photon energies in the selected range. The matrix can be used to convolute a calculated spectrum for comparison with a measured one.The calculated response functions are in agreement with the pulse height distributions measured with monochromatic synchrotron radiation in the energy range from 0.1 keV to 10 keV for three spectrometers with detector crystals different in construction. It is shown that the improved description of the detector response enables the detection of minor components of characteristic lines in fluorescence spectra, which have been attributed earlier to the detector.

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Section: Methodsmentioning

confidence: 99%

Modelling the response function of energy dispersive X‐ray spectrometers with silicon detectors

2009

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“…The sychrotron radiation from bending magnets of the 1.7 GeV BESSY storage ring has a characteristic energy of 2.5 keV. The PTB uses a plane grating monochromator [9] to provide monochromatized radiation of high spectral purity in the 40 eV to 1900 eV spectral range, and a four crystal monochromator [10] using InSb <111> and Si <111> crystals to provide radiation in the spectral range from 1.75 keV to 10 keV.…”

Section: Matrix Readout and Data Processingmentioning

confidence: 99%

Performance and spectroscopic behaviour of DePFET macropixels

Lauf

Aschauer

Herrmann

et al. 2009

2009 IEEE Nuclear Science Symposium Conference Record (NSS/MIC)

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The combinedDetector/Amplifier structure DePFET (Depleted P-channel Field Effect Transistor) features excellent energy resolution, low noise readout at high speed and low power consumption. This is combined with the possibility of random acessibility of pixels and on-demand readout. In addition it possesses all advantages of a sideways depleted device, i.e. 100% fill factor and very good quantum efficiency.Combining the DePFET structure with a silicon drift detector (SDD) like drift ring structure forms a so-called macropixel device which allows for large flexibility in terms of pixel size. All this makes DePFET macropixels a promising new building block for large area silicon radiation detector devices.In this paper, first results of qualifying measurements performed with a macropixel prototype are presented. The detector shows good linearity over the investigated energy range and no significant charge loss within the pixel area.

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“…[67] with its degrees of freedom for the sample manipulator in red and for the detector in blue. The vacuum tank has a diameter of 2 m. Table 6 Compilation of PTB's beamlines and reflectometers used in the (V)UV [20,65,69,72], EUV [16,23,67,68,70,71], and X-ray spectral ranges [17,66]. The measured reflectance R of a sample is defined as:…”

Section: Detector-based Radiometrymentioning

confidence: 99%

A quarter‐century of metrology using synchrotron radiation by PTB in Berlin

Beckhoff¹,

Gottwald²,

Klein³

et al. 2009

Physica Status Solidi (b)

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131

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For more than 25 years, the Physikalisch‐Technische Bundesanstalt has been strongly engaged in the field of metrology using synchrotron radiation. In Berlin, this research programme started together with the user operation of the electron storage ring BESSY I in the early 1980s. At the beginning, the work was focused on fundamental radiometry, i.e. using the storage ring as a primary radiation source standard and operating beamlines for source and detector calibration in the vacuum ultraviolet spectral range. Meanwhile, at the electron storage rings BESSY II and Metrology Light Source in Berlin‐Adlershof, the activities have been extended to a broad range of fundamental and applied photon metrology in the range from the far infrared to hard X‐rays, including methods like cryogenic radiometry, reflectometry and X‐ray fluorescence spectroscopy. In the present review, we give a short historical introduction to this work, describe our laboratories and the basic radiometric principles, and present examples of recent applications, largely performed within the framework of scientific cooperations with external partners from industry and research. (© 2009 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)

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High-accuracy EUV metrology of PTB using synchrotron radiation

Cited by 64 publications

References 0 publications

Modelling the response function of energy dispersive X‐ray spectrometers with silicon detectors

Modelling the response function of energy dispersive X‐ray spectrometers with silicon detectors

Performance and spectroscopic behaviour of DePFET macropixels

A quarter‐century of metrology using synchrotron radiation by PTB in Berlin

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