High Accuracy MEMS Pressure Sensor Based on Quartz Crystal Resonator

Wang, J.; Zhao, Cong; Han, D.; Jin, Xiao; Zhang, S. M.; Zou, Jiang; Wang, M. M.; Li, W. B.; Guo, Yue

doi:10.3390/proceedings1040379

Cited by 8 publications

(3 citation statements)

References 6 publications

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“…However, these methods have their own drawbacks in the compensation processes. Wang, J. et al reported a resonant pressure sensor that employs a temperature sensor for temperature compensation [19,20]. This method is only suitable for a slowly varying temperature.…”

Section: Introductionmentioning

confidence: 99%

A Self-Temperature Compensation Barometer Based on All-Quartz Resonant Pressure Sensor

Han,

Yuan,

Feng

et al. 2024

Sensors

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This paper reports a self-temperature compensation barometer based on a quartz resonant pressure sensor. A novel sensor chip that contains a double-ended tuning fork (DETF) resonator and a single-ended tuning fork (SETF) resonator is designed and fabricated. The two resonators are designed on the same diaphragm. The DETF resonator works as a pressure sensor. To reduce the influence of the temperature drift, the SETF resonator works as a temperature compensation sensor, which senses the instantaneous temperature of the DETF resonator. The temperature compensation method based on polynomial fitting is studied. The experimental results show that the accuracy is 0.019% F.S. in a pressure range of 200~1200 hPa over a temperature range of −20 °C~+60 °C. The absolute errors of the barometer are within ±23 Pa. To verify its actual performance, a drone flight test was conducted. The test results are consistent with the actual flight trajectory.

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Section: Introductionmentioning

confidence: 99%

A Self-Temperature Compensation Barometer Based on All-Quartz Resonant Pressure Sensor

Han,

Yuan,

Feng

et al. 2024

Sensors

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“…As a mass-sensitive sensor, the quartz crystal microbalance (QCM) works on the principle of frequency shift. Te sensor's resonance frequency changes according to the amount of the absorbing or desorbing molecule on the sensor surface [1] or by other infuences such as force [2,3], friction [4], and others. A frequency counter is used as a data acquisition system.…”

Section: Introductionmentioning

confidence: 99%

Four-Channels High-Resolution Frequency Counter for QCM Sensor Array Using Generic FPGA XC6SLX9 Board

Triqadafi

Zafirah

Dharmawan

et al. 2023

Journal of Electrical and Computer Engineering

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A frequency counter is essential for resonance-based sensors like quartz crystal microbalance. An electronic nose or tongue using a QCM sensor array requires a multichannel frequency counter to detect the frequency shift of the sensors simultaneously. The frequency counter’s resolution, precision, and sampling speed are important factors. Board size, energy consumption, and rapid deployment are also considered in the design. This work shows the development of an independent multichannel frequency counter using a commercial Xilinx Spartan 6 series XC6SLX9 board module and a microcontroller board. Both modules are general-purpose modules; therefore, there is no need for a printed circuit board design, resulting in a quick implementation: the use of FPGA results in a compact size and low energy consumption. The developed counter is designed based on a reciprocal counter utilizing the internal logic block of the FPGA. The FPGA module has a built-in 50 MHz TCXO clock and is the reference clock. The high-resolution timing of the counter is realized by multiplying the 50 MHz clock by 6 to reach 300 MHz. The multiplication utilizes the PLL modules in the FPGA. The high precision and accuracy of the counter are achieved by calibrating the timing clock to a 10 MHz rubidium oscillator. The data communication to the microcontroller is done via the SPI by implementing the SPI protocol in the FPGA. The resource is optimized by utilizing PLL and DSP blocks for the counter. Only 5% registers and 5% LUTs of the FPGA resource are used to build a four-channel frequency counter. The result shows that the counter can measure the frequency of incoming signals with a resolution of 0.033 Hz at 10 MHz with a sampling time of 1 second. The system has been tested to monitor the frequency changes of a QCM sensor array.

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“…To measure dynamic changes, piezoelectric sensors can be used, but they are not sensitive for static pressure [ 7 ]. Recent developments for highly accurate sensors are based on resonant detection mechanisms [ 10 , 11 ].…”

Section: Introductionmentioning

confidence: 99%

Characterization of a PCB Based Pressure Sensor and Its Joining Methods for the Metal Membrane

Schwenck

Grözinger

Günther

et al. 2021

Sensors

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Essential quality features of pressure sensors are, among other accuracy-related factors, measurement range, operating temperature, and long-term stability. In this work, these features are optimized for a capacitive pressure sensor with a measurement range of 10 bars. The sensor consists of a metal membrane, which is connected to a PCB and a digital capacitive readout. To optimize the performance, different methods for the joining process are studied. Transient liquid phase bonding (TLP bonding), reactive joining, silver sintering, and electric resistance welding are compared by measurements of the characteristic curves and long-term measurements at maximum pressure. A scanning electron microscope (SEM) with energy-dispersive X-ray spectroscopy (EDX) analysis was used to examine the quality of the joints. The evaluation of the characteristic curves shows the smallest measurement errors for TLP bonding and sintering. For welding and sintering, no statistically significant long-term drift was measured. In terms of equipment costs, reactive joining and sintering are most favorable. With low material costs and short process times, electric resistance welding offers ideal conditions for mass production.

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High Accuracy MEMS Pressure Sensor Based on Quartz Crystal Resonator

Cited by 8 publications

References 6 publications

A Self-Temperature Compensation Barometer Based on All-Quartz Resonant Pressure Sensor

A Self-Temperature Compensation Barometer Based on All-Quartz Resonant Pressure Sensor

Four-Channels High-Resolution Frequency Counter for QCM Sensor Array Using Generic FPGA XC6SLX9 Board

Characterization of a PCB Based Pressure Sensor and Its Joining Methods for the Metal Membrane

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