High Accuracy Profile Measurement With a New Virtual Multi-Probe Scanning System

Chai, Ning; Yin, Ziqiang; Yao, Jianhua

doi:10.1109/access.2020.3020571

Cited by 4 publications

(3 citation statements)

References 24 publications

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“…Another way to achieve high-accuracy measurement is to use the multi-sensor error separation method to eliminate the influence of the straightness error of the guideway [8][9][10][11][12][13][14][15][16][17][18][19][20][21][22][23][24][25][26]. Based on the self-calibration measurement principle, it is not necessary to use a high-accuracy guideway.…”

Section: Introductionmentioning

confidence: 99%

“…To eliminate yaw error, three-probe methods have been proposed [9,10], including the sequential three-probe method, combined three-probe method, and generalized three-probe method. Although the three-probe method can eliminate yaw error, the systematic error between the three probes introduces a parabolic cumulative term in the profile evaluation result, which is the largest error source in these methods [11]. Several studies have addressed the problem of evaluating systematic errors.…”

Section: Introductionmentioning

confidence: 99%

“…For the profile measurement of freeform surfaces, since the motion error of 6 • of freedom per axis must be considered, error separation is still challenging. This means that very complex probe systems and related reconstruction algorithms are necessary, but the increase in complexity usually leads to an increase in the uncertainty of the measurement results [11]. To simplify the multi-probe system and improve reliability, as well as obtain high measurement accuracy and lateral resolution, we propose a virtual multi-sensor (VMS) concept in this study.…”

Section: Introductionmentioning

confidence: 99%

See 2 more Smart Citations

Novel scanning system with error separation for high-accuracy profile measurement

Guo¹,

Zhai²,

Chen³

et al. 2022

Meas. Sci. Technol.

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This paper proposes a method based on a single-probe scanning system for measuring the profile error of an artifact. Our system employs the movement accuracy of a single sensor to achieve a virtual multi-sensor configuration that can function like a traditional multi-sensor. This novel virtual multi-probe scanning system and its corresponding method have the following benefits: (a) A high-accuracy profile can be reconstructed free of the guidance error of the scanning stage. The reconstructed profile has a very high lateral resolution, depending on the lateral resolution (µm level) of the probe. (b) Sensor drift can be restrained using our method, based on the principle of differential reconstruction. The high steep profile can also be measured with a scanning system moving along the measuring direction, thus extending the measuring range. We developed the measurement system and tested the effects of noise, drift, and other factors on the reconstruction results. Finally, some optical surfaces were measured, and comparisons were made between the results obtained from our method and those of a Zygo interferometer. There was high agreement between the two methods, with a deviation of approximately 0.1 μm.

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Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

See 1 more Smart Citation

Novel scanning system with error separation for high-accuracy profile measurement

Guo¹,

Zhai²,

Chen³

et al. 2022

Meas. Sci. Technol.

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show abstract

Ultraprecision machining and on-machine measurement of the radial Fresnel lens structure array of a large-scale roller mold

et al. 2022

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Automation and on-machine manufacturing process measurement is essential in increasing product productivity. However, a significant challenge is the radial Fresnel lens structure-array machining and on-machine measurement research for a large-scale roller mold. We present a rotating A -axis machining method for manufacturing an array of a radial Fresnel lens structure, based on an ultraprecision four-axis drum roll lathe system developed by the team. Therefore, based on the principle of a virtual multiprobe, the traditional two-point method is improved and applied to the on-machine measurement of the radial Fresnel lens structure of the roll mold. Through the machining and on-machine measurement experiments of the radial Fresnel lens structure of the roller mold, the feasibility of the machining method and measurement method is verified.

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A Straightness Error Compensation System for Topography Measurement Based on Thin Film Interferometry

Fang

et al. 2021

Photonics

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Straightness error compensation is a critical process for high-accuracy topography measurement. In this paper, a straightness measurement system was presented based on the principle of fringe interferometry. This system consisted of a moving optical flat and a stationary prism placed close to each other. With a properly aligned incident light beam, the air wedge between the optical flat and the prism would generate the interferogram, which was captured by a digital camera. When the optical flat was moving with the motion stage, the variation in air wedge thickness due to the imperfect straightness of the guideway would lead to a phase shift of the interferogram. The phase shift could be calculated, and the air wedge thickness could be measured accordingly using the image processing algorithm developed in-house. This air wedge thickness was directly correlated with the straightness of the motion stage. A commercial confocal sensor was employed as the reference system. Experimental results showed that the repeatability of the proposed film interferometer represented by σ was within 25 nm. The measurement deviation between the film interferometer and the reference confocal sensor was within ±0.1 µm. Compared with other interferometric straightness measurement technologies, the presented methodology was featured by a simplified design and good environment robustness. The presented system could potentially be able to measure straightness in both linear and angular values, and the main focus was to analyze its linear value measurement capability.

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High Accuracy Profile Measurement With a New Virtual Multi-Probe Scanning System

Cited by 4 publications

References 24 publications

Novel scanning system with error separation for high-accuracy profile measurement

Novel scanning system with error separation for high-accuracy profile measurement

Ultraprecision machining and on-machine measurement of the radial Fresnel lens structure array of a large-scale roller mold

A Straightness Error Compensation System for Topography Measurement Based on Thin Film Interferometry

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