High Anti-Reflection Large-Scale Cup-Shaped Nano-Pillar Arrays via Thin Film Anodic Aluminum Oxide Replication

Abstract

Surface anti-reflection (AR) with nanometer-scaled texture has shown excellent light trapping performance involving optical devices. In this work, we developed a simple and lithography-free structure replication process to obtain large scale surface cup-shaped nano-pillar (CSNP) arrays for the first time. A method of depositing was used for pattern transfer based on PMMA pre-coated through-hole anodic aluminum oxide (AAO) thin film (~500 nm), and eventually, the uniformity of the transferred nanostructures was guaranteed. From the spectrum (250 nm~2000 nm) dependent measurements, the CSNP nanostructured Si showed excellent AR performance when compared with that of the single-polished Si. Moreover, the CSNP was found to be polarization insensitive and less dependent on incidence angles (≤80°) over the whole spectrum. To further prove the excellent antireflective properties of the CSNP structure, thin film solar cell models were built and studied. The maximum value of Jph for CSNP solar cells shows obvious improvement comparing with that of the cylinder, cone and parabola structured ones. Specifically, in comparison with the optimized Si3N4 thin film solar cell, an increment of 54.64% has been achieved for the CSNP thin film solar cell.

Tunable Antireflection Properties with Self-Assembled Nanopillar and Nanohole Structure

“…One can notice that there are many peaks raised inside of the nanoholes, which was caused by the subtle impurities that failed to clean during the process of the PS nanospheres removal in the experiment. Because the dimension of these peaks is very small compared to wavelength, they can function as an anti-reflection film [24].…”

“…dimension of these peaks is very small compared to wavelength, they can function as an anti-reflection film [24].…”

“…Up to now, a variety of photoelectric devices has applied the antireflective technology to improve efficiency, such as solar cells [9][10][11], LEDs [12][13][14], photoelectric detections, and sensors [15,16]. Nanostructure engineering has proven to be a promising strategy for the antireflective methods [17][18][19], such as nanopyramids [20,21], nanorods [22,23], and nanopillars [24]. Nanostructure not only can reduce the high refractive index difference between air and silicon, but also promote more scattered light into the material and restrain more reflected light, which greatly benefits the improving efficiency of photoelectric devices [25,26].…”

Synthesis, Characterization and Performance of Materials for a Sustainable Future

“…A simple and lithography-free structure-replication process to obtain large-scale surface cup-shaped nano-pillar (CSNP) arrays has also been employed [ 7 ]. The CSNP nanostructured Si showed an excellent surface anti-reflection performance when compared to that of the single-polished Si.…”