High-aspect-ratio microdrilling in polymeric materials with intense KrF laser radiation

Lazare, Sylvain; Lopez, John; Weisbuch, François

doi:10.1007/s003399900218

Cited by 45 publications

(26 citation statements)

References 1 publication

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“…It is seen that the results obtained in this work are close to those reported in the literature. 24 Using a proper laser fluence ͑usually high fluence͒ can reduce the angle of taper. From the Beer's Law and data of the ablation depth in the low laser fluence range, the threshold fluences for Kapton and PET ablation are found to be around 0.07 and 0.1 J/cm 2 , respectively.…”

Section: Laser Ablationmentioning

confidence: 99%

Excimer laser fabrication of polymer microfluidic devices

Kim

2003

Journal of Laser Applications

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Excimer laser ablation of glass-based arrayed microstructures for biomedical, mechanical, and optical applications J. Laser Appl. 17, 38 (2005); 10.2351/1.1848520 Drilling of glass by excimer laser mask projection techniqueSilicon has been a primary material for fabrication of microelectromechanical systems ͑microfluidic devices in MEMS͒ for several decades. This is due to the fact that the MEMS techniques were derived from those used for microfabrication in the semiconductor industry. These techniques are well developed, and can be readily applied for silicon based MEMS fabrication. Nowadays, alternative manufacturing materials and techniques are needed for reducing costs and meeting new requirements. Polymers have many advantages because of their low costs and applications in microfluidics. This article describes processes for fabricating polymer-based MEMS, including machining and bonding techniques. Microfluidic parts are machined on polymers with a KrF excimer laser (ϭ248 nm). Mask patterning and direct laser writing techniques are used. A silicon-on-glass process and an infrared laser bonding process are applied to assemble the machined parts with transparent cover glasses or plastics. As an example, a polymer micropump is fabricated and tested. It is shown that with the use of polymer materials, the performance of the pump is greatly improved.

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Section: Laser Ablationmentioning

confidence: 99%

Excimer laser fabrication of polymer microfluidic devices

Kim

2003

Journal of Laser Applications

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“…Pulsed lasers have an advantage in drilling microholes because of their controllable pulse durations and repetition rates. By reducing beam divergence and improving beam homogeneity, nanosecond UV lasers can be used to fabricate deep holes [6], but the quality of the microstructures appears to deteriorate with increasing aspect ratio. This disadvantage makes the results of drilling unacceptable for some high-precision applications [7], for example, fuel injectors, spinnerets, injection nozzles, etc.…”

Section: Introductionmentioning

confidence: 99%

Femtosecond laser high-efficiency drilling of high-aspect-ratio microholes based on free-electron-density adjustments

et al. 2014

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We studied the micromachining of high-aspect-ratio holes in poly(methylmethacrylate) using a visible double-pulse femtosecond laser based on free-electron-density adjustments. Hole depth and aspect ratio increased simultaneously upon decreasing the wavelength in the visible-light zone. When the pulse energy reached a high level, the free-electron density was adjusted by using a double-pulse laser, which induced fewer free electrons, a lower reflectivity plasma plume, and more pulse energy deposition in the solid bottom. Thus, the aspect ratio of the hole was improved considerably. At a moderate pulse energy level, a 1.3-1.4 times enhancement of both the ablation depth and the aspect ratio was observed when the double-pulse delay was set between 100 and 300 fs, probably due to an enhanced photon-electron coupling effect through adjusting the free-electron density. At a lower pulse energy level, this effect also induced the generation of a submicrometer string. In addition, the ablation rate was improved significantly by using visible double pulses.

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“…[1][2][3] In case of metals, the Nd:YAG laser is commonly used because of its high peak power, ability to be run at wide range of pulse width ͑ms-ns͒, and high repetition rate. For an effective use of the laser beam in micromachining, process parameters such as laser power, pulse width, repetition rate, focal position, pulse overlap, incident angle, and number of pulses must be optimized.…”

Section: Introductionmentioning

confidence: 99%

Copper vapor laser micromachining of 304 stainless steel

El-Bandrawy

Nagarathnam

Gupta

et al. 2003

Journal of Laser Applications

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A copper vapor laser ͑CVL͒ of 511/578 nm wavelength, 25 ns pulse width, and 10 kHz repetition rate combined with a computer controlled galvo head was used for laser micromachining of 304 stainless steel. The objective of this study was to develop the CVL micromachining process and its optimization. We observed a significant improvement in micromachining quality with a spatially filtered beam. Micromachining experiments were carried out on stainless steel strip samples of 75, 153, and 356 m thickness. We studied the ablation rate using a single pulse and monitored the heat affected zone ͑HAZ͒ as a function of the applied laser power density. The ablated volume and HAZ are directly proportional to the applied laser power density for low to medium laser powers ͑up to 2ϫ10 13 W/m 2 ). The ranges of HAZ diameter and ablated volume were 15.3-28.7 m and 112.8 -537.6 m 3 , respectively, for the applied power density in the range of 1.0-63.7ϫ10 13 W/m 2 . The roughness created by ablation process was studied at various pulse overlaps at laser power density of 87.8ϫ10 13 W/m 2 . Ablation depth and surface roughness were found to be inversely proportional to the center-to-center pulse overlap and directly proportional to the power density.

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High-aspect-ratio microdrilling in polymeric materials with intense KrF laser radiation

Cited by 45 publications

References 1 publication

Excimer laser fabrication of polymer microfluidic devices

Excimer laser fabrication of polymer microfluidic devices

Femtosecond laser high-efficiency drilling of high-aspect-ratio microholes based on free-electron-density adjustments

Copper vapor laser micromachining of 304 stainless steel

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