High aspect ratio nano fluidic channels by laser controlled fracturing

Self-sealed circular channels for micro-fluidics

“…The channel's dimensional specifications vary from <100 nm to couple of micrometers for diameter and few to hundreds of micrometers for length. A wide range of techniques are being employed for the fabrication of micro or nano-channels using materials like silicon, quartz, polymers, metals and plastics [4][5][6][7][8][9][10][11] but they are either limited by the channel dimensions that they can realize or the complexity of the process.…”

Visible laser microfabrication of transparent plastic using Au nanoparticles-dispersed polymer film

“…For the conventional laser processing, it is common to use a high power (average power output of 100 W) and a high pulse rate (peak power output of 10 mW per pulse) laser such as YAG laser (Hui et al, 2002;Slocombe and Li, 2000) and excimer laser (Illy et al, 2000;Salleo et al, 2000). One of the features of the laser fabrication technique using Au nanoparticles-dispersed polymer film is that a microscale channel and hole with the high aspect ratio can be processed using a low power output laser without the photolithography step and using neither a poisonous reagent nor the gas.…”

The effect of polymer matrix on laser microfabrication of Au nanoparticles dispersed polymer resists

“…Laser processing has been known as a technique having a flexible controllability for the processing shape. For the conventional laser processing, it is common to use a high power (average power output of 100 W) and a high pulse rate (peak power output of 10 MW per pulse) laser such as YAG laser [5,6] and excimer laser [7,8]. One of the features of the laser fabrication technique using Au nanoparticles dispersed polymer resist is that a micro-scale channel and hole with high aspect ratio can be fabricated using a low power output laser without the photolithography step and using neither a poisonous reagent nor the gas.…”